The present thesis addresses two research areas related to film growth in a highly ionized magnetron sputtering system: plasma characterization, and thin film growth and analysis. The deposition technique used is called high power pulsed magnetron sputtering (HPPMS). Characteristic for this technique are high energy pulses (a few Joules) of length 50-100 μs that are applied to the target (catho...

We report the first measurements and detailed analysis of extreme ultraviolet (EUV) spectra (4 nm to 20 nm) of highly-charged tungsten ions W to W obtained with an electron beam ion trap (EBIT). Collisional-radiative modelling is used to identify strong electric-dipole and magnetic-dipole transitions in all ionization stages. These lines can be used for impurity transport studies and temperatur...

Vibrational and electron kinetics, as well as electronic excited states and ionization kinetics, have been coupled self consistently solving master and Boltzmann equation at the same time. These kinetics have been inserted in a quasi one-dimensional code for the high enthalpy nozzle expansion. INTRODUCTION The supersonic expansion through a nozzle flow is characterised by strong non-equilibrium...