Many forms of scanning probe microscopy require a piezoelectric actuator to vary the probe-sample distance. Examples include constant-force atomic force microscopy and constant-current scanning tunneling microscopy. In such modes, the topography of the sample is reconstructed from the voltage applied to the vertical piezoelectric actuator. However, piezoelectric actuators exhibit significant hy...

In this article, the design of rectangular symmetric bimorph piezoelectric ceramic transducers with loose and fixed edges and with parallel electric excitation is studied. Rectangular piezoelectric ceramic transducers in cosinusoidal flexural vibration with straight and parallel nodal lines of vibration are studied. The radiation of the transducer in a plane perpendicular to the surface of the ...

Considering the problems of model uncertainties, higher harmonics, uncertain boundary conditions, external excitations, and system time delay in practical vibration control system, a novel active method is proposed to suppress thin plate structure with acceleration sensor piezoelectric bimorph actuator this paper. First, nonlinear extended state observer (NESO)-based controller designed ensure ...

In this study, a PID controller was designed for the active vibration suppression of a smart beam equipped with PZT (Lead-Zirconate-Titanate) patches. The smart beam is a cantilever aluminium beam having eight symmetrically located surface-bonded piezoelectric patches. In this particular application, a group of PZT patches closed to the root of the beam was used as actuators and from the remain...

In this work, the design, fabrication process and theoretical characterization of an XYZ gap-closing microstage actuator based on a simple, two-mask silicon-on-insulator (SOI) process is presented. An aluminum thin film is selectively deposited on the serpentine supporting springs of the actuator forming a bimorph structure. The lattice mismatch between silicon and the aluminum film introduces ...

In this work, we design and simulate a valve less, diaphragm-based, piezoelectric micro pump. The piezoelectric actuator is a PZT-5H piezo-disk, the diaphragm is a borosilicate glass plate. All the simulations were made using COMSOL Multiphysics software. First, the piezoelectric actuator and membrane thicknesses were chosen by means of a stationary simulation, using the piezoelectric devices m...

The Inertially Stabilized Rifle is a new stabilized rifle system that can eliminate the disturbances induced by the shooter. Recurve actuator is used in this system to provide the precise movement of the rifle barrel. In such a portable device, only low voltage electrical sources are available yet the piezoelectric actuator needs high voltage to drive the actuator. The actuators consume little ...

In this research, a functionally graded microbeam bonded with piezoelectric layers is analyzed under electric force. Static and dynamic instability due to the electric actuation is studied because of its importance in micro electro mechanical systems, especially in micro switches. In order to prevent pull-in instability, two piezoelectric layers are used as sensor and actuator. A current amplif...

This paper has been investigated a technique that predicts the performance of a bar-type unimorph piezoelectric vibration actuator depending on the frequency. This paper has been proposed an equivalent circuit that can be easily analyzed for the bar-type unimorph piezoelectric vibration actuator. In the dynamic analysis, rigidity and resonance frequency, which are important mechanical elements,...