We describe the preparation of a tungsten pillar nanoimprint stamp without the use of lithography and etching techniques. Structures with heights of 15 nm were prepared on the basis of self-ordered porous alumina templates and this was followed by DC sputtering of tungsten. The stamp was successfully used to prepare an aluminium surface to obtain highly ordered porous anodic alumina films after...

Resist-free antireflective (AR) nanostructured films are directly fabricated on polycarbonate (PC) film using thermal-nanoimprint lithography (T-NIL) and the moth-eye shape of AR nanostructure is elaborately optimized with different oxygen reactive ion etching conditions. Anodic aluminum oxide (AAO) templates are directly used as master molds of T-NIL for preparation of AR nanostructures on PC ...

This paper describes a lithography-based microfabrication process developed for a recuperative heat exchanger intended for use in a cryosurgical probe. The probe, which uses the Joule-Thomson (JT) cooling cycle, must achieve a temperature < -50°C, with a freeze rate of 25-50°C/min. The heat exchanger must maintain high stream-to-stream thermal conductance while restricting parasitic stream-wise...

A novel structure of the resonant pressure sensor is presented in this paper, which tactfully employs intercoupling between dual pressure-sensing diaphragms and a laterally driven resonant strain gauge. After the resonant pressure sensor principle is introduced, the coupling mechanism of the diaphragms and resonator is analyzed and the frequency equation of the resonator based on the triangle g...

We demonstrate a method for embossing titania sol--gel precursor with poly(methyl methacrylate) (PMMA) molds to make thin films of titania that have dense arrays of 35--65 nm diameter pores, whose features are 1 order of magnitude smaller than those previously demonstrated for sol--gel molding. We show that the high modulus of PMMA is necessary to preserve small features with high aspect ratios...

Gradient surfaces are emerging tools for investigating mammalian cell-surface interactions in high throughput. We demonstrate the electrochemical fabrication of an orthogonal gradient platform combining a porous silicon (pSi) pore size gradient with an orthogonal gradient of peptide ligand density. pSi gradients were fabricated via the anodic etching of a silicon wafer with pore sizes ranging f...

A 1500 mm 1200 mm scanning mirror having vertical comb fingers has been fabricated by using silicon-on-insulator (SOI)-based fabrication processes. It is a vertically driven electrostatic scanner and composed of two structures having vertical comb fingers. The comb fingers are etched by deep inductively coupled plasma reactive ion etching (ICPRIE) and assembled by the flip chip aligner bonder. ...

As biocompatible metallic materials, titanium and its alloys have been widely used in the orthopedic field due to their superior strength, low density, ease of processing. However, further improvement biological response is still required for rapid osseointegration. Here, various Ti surface-treatment technologies were applied: hydroxyapatite blasting, sand blasting acid etching, anodic oxidatio...

We investigated the feasibility of hydrogen storage with electrochemically formed VO2 nanotubes. The nanotubes were fabricated through anodization vanadium metal in fluoride ion-containing organic electrolyte followed by an annealing process Ar-saturated atmosphere at 673 K for 3 h a heating rate /min. During anodization, current density significantly increased up to 7.93 mA/cm2 approximately 5...

The formation of macropores in silicon during electrochemical etching processes has attracted much interest. Experimental evidences indicate that charge transport in silicon and in the electrolyte should realistically be taken into account in order to be able to describe the macropore morphology. However, up to now, none of the existing models has the requested degree of sophistication to reach...