The design, development and performance evaluation of a novel radio frequency microelectromechanical systems (MEMS) gyroscope, based on a surface acoustic wave resonator (SAWR) and a surface acoustic wave sensor is presented in this paper. Most of the MEMS gyroscopes based on silicon vibratory structures that utilize the energy transfer between the two vibratory modes demand small fabrication t...

Abstract A photoacoustic spectrometer has been developed to measure in situ light absorption by aerosol. The measured quantity is the sound pressure produced in an acoustic resonator caused by light absorption. The current lower detection limit for light absorption is 0.4 Mm which corresponds to an elemental carbon mass density of ≈ 40 ng/m assuming an efficiency for light absorption of 10 m/g....

Thin film bulk acoustic wave (BAW) resonators and filters operating in the GHz range are used in mobile phones for the most demanding filtering applications and complement the surface acoustic wave (SAW) based filters. Their main advantages are small size and high performance at frequencies above 2 GHz. This work concentrates on the characterization, performance optimization, and modelling tech...

Monitoring physical quantities using acoustic wave devices can be advantageously achieved using the wave characteristic dependence to various parametric perturbations (temperature, stress, and pressure). Surface acoustic wave (SAW) resonators are particularly well suited to such applications as their resonance frequency is directly influenced by these perturbations, modifying both the phase vel...

The two-dimensional and virtually massless character of graphene attracts great interest for radio frequency devices, such as surface and bulk acoustic wave resonators. Due to its good electric conductivity, graphene might be an alternative as a virtually massless electrode by improving resonator performance regarding mass-loading effects. We report on an optimization of the commonly used wet t...

A new room temperature supra-molecular cryptophane A (CrypA)-coated surface acoustic wave (SAW) sensor for sensing methane gas is presented. The sensor is composed of differential resonator-oscillators, a supra-molecular CrypA coated along the acoustic propagation path, and a frequency signal acquisition module (FSAM). A two-port SAW resonator configuration with low insertion loss, single reson...

Bulk acoustic wave (BAW) resonators are widely applied in filters and gravimetric sensors for physical or biochemical sensing. In this work, a new architecture of BAW resonator is demonstrated, which introduces a pair of reflection layers onto the top of a thin film bulk acoustic resonator (FBAR) device. The new device can be transformed between type I and type II dispersions by varying the thi...