This paper presents an innovative design of a low loss RF MEMS switch, with low actuation voltage (VT) & improved mechanical stability. The switch is less sensitive to the stiction and has less damping effect which ultimately increases the reliability of the switch. The specialty of this switch is that its beam is made up of two materials, one gives mechanical stability and other provides the c...

Abstract: The study in this paper is motivated by the modeling of control valves with significant stiction. By assuming linear dynamics of the controlled process, the joint characterization of the control valve and of the controlled process is formulated as the identification of an extended Hammerstein system. A point-slope-based hysteresis model is used to describe the input hysteresis nonline...

We present a detailed study on an active thermal recovery mechanism intended to counteract stiction in an electrostatically actuated RF-MEMS switch. A problemadapted, hierarchized analysis procedure based on a recently derived and presented finite element (FE) model has been applied to investigate the impact of different design and material parameters on the efficiency of this mechanism as well...

Stiction is a well known problem of the process performance. Compensate its effect is essential, because most of sticky valves cannot be replaced and they remain working for months or years. The scope of this work is to propose a novel methodology to compensate stiction effects, through the modification of the controller (PI) block in the control loop. The proposed approach is based on the two ...