AbstructMicro hot-film shear-stress sensors have been designed and fabricated by surface micromachining technology which is compatible with IC technology. A polysilicon strip, 2 pmx80 pm, is deposited on top of a thin silicon nitride film and functions as the sensor element. By using the sacrificial-layer technique, a cavity (a vacuum chamber of about 300 mtorr), 2 0 0 x 2 0 0 ~ 2 pm, is placed...

For an example of a silicon-based micromachined analyzer, we describe a combined PO2, PCO2, and pH sensor designed for extracorporeal blood gas monitoring. The clinically well-accepted amperometric (PO2) and potentiometric (PCO2, pH) sensing principles are used, realized in a planar and miniaturized form on a single silicon chip (6 x 22 mm). The transducer part of the chip is fabricated by stan...

A novel nc-Si/c-Si heterojunction MOSFETs pressure sensor is proposed in this paper, with four p-MOSFETs with nc-Si/c-Si heterojunction as source and drain. The four p-MOSFETs are designed and fabricated on a square silicon membrane by CMOS process and MEMS technology where channel resistances of the four nc-Si/c-Si heterojunction MOSFETs form a Wheatstone bridge. When the additional pressure i...

Silicon photonic crystal sensors have become very attractive for various optical sensing applications. Using silicon as a material platform provides the ability to fabricate sensors with other photonic devices on a single chip. In this paper, a new optical sensor based on optical resonance in a one-dimensional silicon photonic crystal with an air defect is theoretically studied for refractive i...

In this study, we describe the design of a tactile sensor based on polyvinylidene fluoride (PVDF). The sensor exhibits high force sensitivity and linearity. This sensor is integrated with an endoscopic grasper tool and can be used in minimally invasive surgeries. It consists of three distinct layers. A rigid micro-machined tooth-like silicon constitutes the top layer of the grasper, and the Ple...

In this work we describe a one degree-of-freedom microelectromechanical thermal displacement sensor integrated with an actuated stage. The system was fabricated in the device layer of a silicon-on-insulator wafer using a single-mask process. The sensor is based on the temperature dependent electrical resistivity of silicon and the heat transfer by conduction through a thin layer of air. On a me...

In this study, a graphene-doped porous silicon (G-doped/p-Si) substrate for low ppm H₂ gas detection by an inexpensive synthesis route was proposed as a potential noble graphene-based gas sensor material, and to understand the sensing mechanism. The G-doped/p-Si gas sensor was synthesized by a simple capillary force-assisted solution dropping method on p-Si substrates, whose porosity was genera...

We performed numerical analysis and design parameter optimization of a silicon-based grating waveguide refractive index (RI) sensor. The performance of the grating waveguide RI sensor was determined by the full-width at half-maximum (FWHM) and the shift in the resonance wavelength in the transmission spectrum. The transmission extinction, a major figure-of-merit of an RI sensor that reflects bo...

In this study, a graphene-doped porous silicon (G-doped/p-Si) substrate for low ppm H2 17 gas detection by an inexpensive synthesis route was proposed as a potential noble graphene-based 18 gas sensor material and to understand the sensing mechanism. The G-doped/p-Si gas sensor was 19 synthesized by a simple capillary force-assisted solution dropping method on p-Si substrates, 20 whose porosity...

Advances in wireless technologies, low-power electronics, the internet of things, and in the domain of connected health are driving innovations in wearable medical devices at a tremendous pace. Wearable sensor systems composed of flexible and stretchable materials have the potential to better interface to the human skin, whereas silicon-based electronics are extremely efficient in sensor data p...