We have developed a soft-material elastic modulus and shear modulus sensor using piezoelectric cantilevers. A piezoelectric cantilever is consisted of a highly piezoelectric layer, e.g., lead– zirconate–titanate bonded to a nonpiezoelectric layer, e.g., stainless steel. Applying an electric field in the thickness direction causes a piezoelectric cantilever to bend, generating an axial displacem...

The resonant frequency and sensitivity of an atomic force microscope (AFM) cantilever with assembled cantilever probe (ACP) have been analyzed and a closed-form expression for the sensitivity of vibration modes has been obtained. The proposed ACP comprises an inclined cantilever and extension, and a tip located at the free end of the extension, which makes the AFM capable of topography at sidew...

This paper demonstrates and compares different experimental techniques utilized to estimate the quality factor (Q) and natural frequency from non-contact measurements of Microelectromechanical Systems (MEMS) motions. The relative merits of those techniques are contrasted in Q factor estimation for a cantilever beam MEMS actuator, operated in three configurations: free standing, arc-shaped, and ...

Selective Ga + ion implantation and miring by focused ion beam exposure and subsequent wet chemical etching is used to fabricate micro/nanomechanical elements in Si. Freestanding elements with a ~ 30 nm membrane thickness are made by controlled selective underetching between unexposed and exposed areas. Ultrahigh-frequency cantilever beams have been made with resonances in the tens of MHz range...

A simple and accurate experimental method is described for determining the effective cantilever spring constant and the detector sensitivity of atomic force microscopy cantilevers on which a colloidal particle is attached. By attaching large (approximately 85 microm diameter) latex particles at various positions along the V-shaped cantilevers, we demonstrate how the normal and lateral spring co...

This study proposes new microcantilever designs in slotted step configuration to improve the S/N ratio of surface stress-based sensors used in physical, chemical, biochemical and biosensor applications. The cantilevers are made of silicon dioxide with a u-shaped silicon piezoresistor in p-doped. The cantilever step length and piezoresistor length is varied along with the operating voltage to ch...

Experiments on Highly Oriented Pyrolytic Graphite (HOPG) demonstrate that ultrasonic-assisted actuation with the tip of an Atomic Force Microscope (AFM) cantilever can induce stacking modifications and folding of triangular-shaped HOPG surface flakes. We have generated permanent displacements of buried dislocations that require stacking changes of extended graphene layers by repeatedly scanning...

Spin-triplet superfluids can support exotic objects, such as half-quantum vortices characterized by the nontrivial winding of the spin structure. We present cantilever magnetometry measurements performed on mesoscopic samples of Sr(2)RuO(4), a spin-triplet superconductor. With micrometer-sized annular-shaped samples, we observed transitions between integer fluxoid states as well as a regime cha...

In laser powder bed fusion, process-inherited thermal residual stress is developed due to the strain misfit between each layer. Detailed analysis and a prediction of are needed because it can induce distortions components and, in some serious cases, stress-induced defects such as cracking. this work, effects heat treatment conditions on maraging 18Ni-300 steel, fabricated by were investigated. ...