The fabrication and structural characterization of a surface micromachined, resonant frequency, Pb(Zr, Ti)O3 (PZT) microcantilever will be presented. The PZT microcantilever was fabricated using surface micromachining techniques, and used a low-stress silicon nitride thin film as the base material for the microcantilever onto which a PZT thin film was incorporated. The PZT thin film is used as ...

This paper provides a quantitative comparison and explores the design space of PZT-only (Lead Zirconium Titanate) and PZT-onSilicon length-extensional mode resonators for incorporation into RF MEMS filters and oscillators. We experimentally measured the correlation of motional impedance (RX) and quality factor (Q) with the resonators’ silicon layer thickness (tSi). For identical lateral dimensi...

In this chapter, various synthesis routes for PZT powders and fabrication processing techniques for PZT ceramics and films are reviewed. Emphasis is placed on chemical routes, especially the hydrothermal synthesis of PZT powders. The principles of the colloidal chemistry in ceramic suspension and its application to the colloidal processing of ceramics and films, especially when using sub-micron...

In this contribution we present the compositional dependence of the longitudinal piezoelectric coefficient (d33,f), residual stress and Young’s modulus of Pb(Zrx,Ti1−x)O3 (PZT) thin films. Pulsed laser deposition (PLD) was used to deposit epitaxial PZT thin films with a < 110 > preferred orientation on silicon cantilevers. By using PLD, excellent piezoelectric properties of the PZT were observe...

PZT-Poly(vinylidene fluoride) composites were prepared by hot-pressing method. Before addition, PZT particles were firstly modified with two different coupling agents. The micromorphology, microstructure, dielectric properties, and piezoelectric properties of the composites were characterized and investigated. Results indicated that PZT particles were homogeneously dispersed in the PVDF matrix ...

This paper provides a quantitative comparison and explores the design space of lead zirconium titanate PZT –only and PZT-on-silicon length-extensional mode resonators for incorporation into radio frequency microelectromechanical system filters and oscillators. We experimentally measured the correlation of motional impedance RX and quality factor Q with the resonators’ silicon layer thickness tS...

Pb(Zr0.52Ti0.48)O3 (PZT) nanotubes with diameters of 80–100 nm and a wall thickness of 15–20 nm were prepared by sol–gel template technique and using multi-walled carbon nanotubes (MWCNT) as sacrificial templates. The coating process of MWCNT with PZT precursor sol and removal of the carbon nanotubes by an interrupt heat treatment were discussed and studied by Raman spectroscopy. Simultaneous t...

This paper reviews deposition, integration, and device fabrication of ferroelectric PbZrxTi1−xO3 (PZT) films for applications in microelectromechanical systems. As examples, a piezoelectric ultrasonic micromotor and pyroelectric infrared detector array are presented. A summary of the published data on the piezoelectric properties of PZT thin films is given. The figures of merit for various appl...

A post-tensioning tendon duct filled with grout can effectively prevent corrosion of the reinforcement, maintain bonding behavior between the reinforcement and concrete, and enhance the load bearing capacity of concrete structures. In practice, grouting of the post-tensioning tendon ducts always causes quality problems, which may reduce structural integrity and service life, and even cause acci...