Stress induced by ultrasonic dissipation during thermosonic ball bond formation is measured in-situ using microsensors integrated below test bonding pads. The devices are fabricated using a commercial CMOS process, exploiting p + diffusion as piezoresis-tive sensing material. We report time-dependent on-line measurements of the stress-induced resistance change. Higher harmonics of the microsens...

Networks of distributed microsensors are emerging as a compelling solution for a wide range of data gathering applications. Perhaps the most substantial challenge facing designers of small but long-lived microsensor nodes is the need for significant reductions in energy consumption. We propose a power-aware design methodology that emphasizes the graceful scalability of energy consumption with f...

AIMS To demonstrate that a sensor, which is inserted through the sclera and placed in intimate contact with the choroid, can reliably detect changes in the intraocular pressure (IOP). METHODS A manometer was used to control the IOP of three cadaver eyes in steps of 7 mm Hg. A piezoresistive pressure sensor was used to measure the pressure at the choroid through a 2.5 mm diameter hole that was...

Wireless sensor networks are potentially one of the most important technologies of this century. Advances in hardware development have made available the prospect of low cost, low power, miniature devices for use in remote sensing applications. The combination of these factors has improved the viability of utilizing a sensor network consisting of a large number of intelligent sensors, enabling ...

The vibration analysis is an important step in the design and optimization of microsensors. In most of the cases, COMSOL software is employed to consider the size-dependency on the dynamic behavior in the MEMS sensors. In this paper, the Modified Couple Stress Theory (MCST) is used to capture the size effect on dynamic behavior in a microsensor with two layers of the silicon and piezoelectric. ...

Microsensor network technology will have a significant impact on our lives in the 21st century. Microsensor devices, ranging in size from cubic inches to cubic millimeters, will each have multiple on board miniaturized sensors (such as for light, temperature, humidity, acoustics, imaging, etc.), with considerable processing power, in each geographic position ability through global positioning s...