Although the various effects of strain on silicon are subject of intensive research since the 1950s the physical background of anomalous piezoresistive effects in Si nanowires (NWs) is still under debate. Recent investigations concur in that due to the high surface-to-volume ratio extrinsic surface related effects superimpose the intrinsic piezoresistive properties of nanostructures. To clarify...

In high speed and high precision machining applications, it is important to monitor the machining process in order to ensure high product quality. For this purpose, it is essential to develop a dynamometer with high sensitivity and high natural frequency which is suited to these conditions. This paper describes the design, calibration and performance of a milling torque sensor based on piezores...

This paper presents the design of a wireless pressure-monitoring system for harsh-environment applications. Two types of ceramic pressure sensors made with a low-temperature cofired ceramic (LTCC) were considered. The first type is a piezoresistive strain gauge pressure sensor. The second type is a capacitive pressure sensor, which is based on changes of the capacitance values between two elect...

S.Z. cantilevers are made using a simple one-mask fabrication process with.characterization of a cantilever-type MEMS chemical sensor for detection of chemicals. MEMS has been with the advancement of cantilever-type sensors.sensor. The mechanical structure is a cantilever, having its own resonant frequency. MEMS cantilevers can be as thin as a few nanometers with lengths.Cantilever-based Sensor...

This paper proposes the electronic heart sound sensor, based on the piezoresistive principle and MEMS (Micro-Electro-Mechanical System) technology. Firstly, according to the characteristics of heart sound detection, the double-beam-block microstructure has been proposed, and the theoretical analysis and finite element method (FEM) simulation have been carried out. Combined with the natural freq...

Flexible tactile sensors capable of detecting the magnitude and direction of the applied force together are of great interest for application in human-interactive robots, prosthetics, and bionic arms/feet. Human skin contains excellent tactile sensing elements, mechanoreceptors, which detect their assigned tactile stimuli and transduce them into electrical signals. The transduced signals are tr...

A new sensor made of a vinyl-ester polymer composite filled with multilayer graphene nanoplatelets (MLG) is produced through an innovative capillary rise method for application in strain sensing and structural health monitoring. The new sensor is characterized by high stability of the piezoresistive response under quasi-static consecutive loading/unloading cycles and monotonic tests. This is du...

In order to meet the requirement of high sensitivity and signal-to-noise ratios (SNR), this study develops and optimizes a piezoresistive pressure sensor by using double silicon nanowire (SiNW) as the piezoresistive sensing element. First of all, ANSYS finite element method and voltage noise models are adopted to optimize the sensor size and the sensor output (such as sensitivity, voltage noise...