نتایج جستجو برای: piezoelectric layer
تعداد نتایج: 295762 فیلتر نتایج به سال:
Gallium nitride (GaN), in contrast to other commonly used piezoceramics, is a semiconductor that exhibits piezoresistive in addition to piezoelectric effects. The large piezoresponse – combined piezoelectric and piezoresistive effects – of GaN points out possible applications of GaN-based material systems in resonant devices. While the static piezoresistive response of GaN is small [1], the tim...
We report on a novel microfabrication method to fabricate aluminum nitride (AlN) piezoelectric microstructures down to 2 microns size by a surface micromachining process. Highly c-axis oriented AlN thin films are deposited between thin Cr electrodes on polysilicon structural layers by rf reactive sputtering. The top Cr layer is used both as a mask to etch the AlN thin films and as an electrode ...
Cement-based piezoelectric materials are widely used due to the fact that compared with common smart materials, they overcome the defects of structure-incompatibility and frequency inconsistency with a concrete structure. However, the present understanding of the mechanical behavior of cement-based piezoelectric smart materials under impact load is still limited. The dynamic characteristics und...
This paper presents the design and fabrication of a novel piezoelectric actuator for a gas micro pump with check valve having the advantages of miniature size, light weight and low power consumption. The micro pump is designed to have eight major components, namely a stainless steel upper cover layer, a piezoelectric actuator, a stainless steel diaphragm, a PDMS chamber layer, two stainless ste...
Microelectromechanical systems (MEMS) incorporating active piezoelectric layers offer integrated actuation, sensing, and transduction. The broad implementation of such active MEMS has long been constrained by the inability to integrate materials with giant piezoelectric response, such as Pb(Mg(1/3)Nb(2/3))O(3)-PbTiO(3) (PMN-PT). We synthesized high-quality PMN-PT epitaxial thin films on vicinal...
Wang Liang, Bai Rui-xiang*, Yan Cheng State Key Laboratory of Structural Analysis for Industrial Equipment Dalian University of Technology, Dalian 116024, P.R. China * Corresponding author: [email protected] Abstract: This paper studies interfacial debonding behavior of composite beams bonded with piezoelectric material. The focus is put on crack initiation and growth of the piezoelectric adhes...
The step towards the fabrication of nanodevices with improved performance is of high demand; therefore in this study oxygen plasma treated ZnO nanorods based piezoelectric nanogenerator is developed on the single layer graphene coated PET flexible polymer substrate. ZnO nanorods on the single layer graphene are grown by hydrothermal growth method and the structural study is carried out by using...
This paper presents the elastic buckling of homogeneous beams with a pair of piezoelectric layers surface bonded on both sides of the beams. The displacement field of beam is assumed based on the Engesser-Timoshenko beam theory. Applying the Hamilton's principle, the equilibrium equation is established. The influences of applied voltage, dimensionless geometrical parameter and piezoelectric thi...
Mathematical models and circuitry necessary for optimal energy conversion have been developed for piezoelectric devices because of their ability to convert mechanical energy to electrical energy. The piezoelectric device that is the focus of this study is a curved, thin unimorph prestressed bender. This device consists of layers of piezoelectric material, polyimide, and metal bonded at high tem...
This paper researches the dedicated piezoelectric sensor for airflow information sensitivity which uses PZT-5A piezoelectric material and rigid polyurethane foam to act as its matching materials. It adopts multiplex mode to realize the broadband design of sensor and does finite element simulation to establish admittance grid, sound field distribution diagram and model in which cylinder is added...
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