abstract: this paper presents dynamic modelling and control of a linear prismatic series of elastic actuator. the capability of generating large torques is why this actuator is increasingly used in human-assistive robotic systems. due to having human in the loop, the actuator requires precise control. a fractional pid controller known for its improved performance is used for the control, due to...

This paper developed an active scanning probe array. The probe array consists of 16×2 probes thermally actuating and sensing. The 32 probes are integrated with Ti/Pt temperature sensors and bimorph thermal actuators. Each probe is a Si3N4 cantilever equipped with a sharp nano scale pyramid tip at its free end. When one of the probes is actuated, its neighboring probes can provide temperature se...

The technique used to control the airflow is based on the electro-hydrodynamic actuator which is also called plasma actuator. This actuator ensures the airflow control thanks to the electric wind created by the electrical corona discharge. This ionic wind is developed at the profile surface tangential to the initial free airflow so that it has a significant effect on the boundary layer flow. Th...

High resolution and noncontacted measurement tools for the dynamic characterization of micro devices are necessary to develop high performance/precision and reliable microelectromechanical systems (MEMS). In this paper, a three-dimensional dynamic measurement system based on stroboscopic and interferometric methods is presented. This system can capture bright-fielded and interferometric images ...

For control applications aiming accurate positioning and path tracking friction modelling and compensation can be very important, especially when working with small displacements as usual in nano technologies. The paper at hand describes friction identification and friction model application for a linear high-precision ball bearing guide driven by a voice coil actuator and using high-resolution...

Conjugated polymer actuators can be employed to achieve micro and nano scale precision, and have wide range of applications including biomimetic robots and biomedical devices. In comparison to robotic joints, they do not have friction or backlash, but on the other hand, they have complicated electro-chemo-mechanical dynamics which makes modeling and control of the actuator really difficult. Bes...