Abstract Optimization of the suspension micromechanical accelerometer, which is a part an angular velocity measurement unit, was considered. This problem faced because need to improve design existing device meet new technical requirements. Shock loads up 1 000 g exceed ultimate for accelerometers by several orders magnitude. During study, it turned out that unit shell works as resonator, so sho...

[1] Measurements of snow using a high-resolution micropenetrometer can be used to discriminate between different snow types; in lower-density snow the signal is sensitive to microstructure, and micromechanical properties can be estimated. Although a physics-based snow penetration theory was first developed almost a decade ago, since that time the majority of studies using snow micropenetrometer...

This paper presents the design and a new low-cost process for fabrication of a second-order micromechanical filter using UV-LIGA technology. The micromechanical filter consists of two identical bulk-mode ring resonators, mechanically coupled by a flexural-mode beam. A new lumped modeling approach is presented for the bulk-mode ring resonators and filter. The validity of the analytical derivatio...

Micromechanical Resonant Switches (“Resoswitches”) and Resonant Power Converters by Yang Lin Doctor of Philosophy in Electrical Engineering and Computer Sciences University of California, Berkeley Professor Clark T.-C. Nguyen, Chair Micromechanical resonant switches (“resoswitches”) that harness the high-Q resonance and nonlinear dynamical properties of micromechanical structures are demonstrat...

The electromechanical coupling factors (ηe’s) of capacitively-transduced micromechanical resonators have been increased by a factor of 8.1× via a process technology that utilizes atomic layer deposition (ALD) to partially fill the electrode-toresonator gaps of released resonators with high-k dielectric material and thereby achieve effective electrode-to-resonator gap spacings as small as 32 nm....

Glucose responsive polymer brushes were synthesized on gold substrates and microcantilever arrays. The response properties of these brushes were evaluated by exposing them to different glucose concentrations for a range of pH values. This work demonstrates the potential for polymer brush-functionalized micromechanical cantilevers as glucose detectors. Furthermore, the work demonstrates that sti...

Micromechanical communication circuits fabricated via IC-compatible MEMS technologies and capable of low-loss filtering, mixing, switching, and frequency generation, are described with the intent to miniaturize wireless transceivers. Possible transceiver front-end architectures are then presented that use these micromechanical circuits in large quantities to substantially reduce power consumpti...

Third-order, micromechanical bandpass filters comprised of three folded-beam resonators coupled by flexural mode springs are demonstrated using an IC-compatible, polysilicon surface-micromachining technology. The use of quarter-wavelength coupling beams attached to resonators at their folding-trusses is shown to suppress passband distortion due to finite-mass nonidealities, which become increas...

Micromechanical communication circuits fabricated via IC-compatible MEMS technologies and capable of low-loss filtering, mixing, switching, and frequency generation, are described with the intent to miniaturize wireless transceivers. Possible transceiver front-end architectures are then presented that use these micromechanical circuits in large quantities to substantially reduce power consumpti...