نتایج جستجو برای: microelectromechanical systems
تعداد نتایج: 1183720 فیلتر نتایج به سال:
Article history: Received 1 June 2015 Received in revised form 22 July 2015 Accepted 22 July 2015 Available online xxxx
This paper presents a high-bandwidth capacitance estimation and driving circuit especially tailored for its use with MEMS electrostatic actuators. The circuit can be integrated as a part of a system comprising an electrostatic actuator to provide self-testing and failure prediction capabilities and also as a simple and low-cost actuator dynamics characterization system capable of measuring both...
Modeling and simulation of MEMS is of vital importance to develop innovative products and to reduce time-to-market at lower total costs. Advanced design methodologies and a variety of software tools are utilized by the MEMS-Design group in order to analyze complex geometrical structures, to account for interactions among different physical domains and to capture the cooperative play of micro de...
The use of SU-8 as precursor for glass-like carbon, or glassy carbon, is presented here. SU-8 carbonizes when subject to high temperature under inert atmosphere. Although epoxy-based precursors can be patterned in a variety of ways, photolithography is chosen due to its resolution and reproducibility. Here, a number of improvements to traditional photolithography are introduced to increase the ...
This paper addresses an overview of the wireless sensor networks. It is shown that MEMS/NEMS technologies and SIP concept are well suited for advanced architectures. It is also shown analog architectures have to be compatible with digital signal techniques to develop smart network of microsystem.
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