Abstract This work proposes an examination into the static and dynamic behaviors of in-plane V-shaped microbeam under both electric forces axial loads. The microbeams are actuated with two separate electrodes uniform air gap across their length. effects initial rise DC bias voltage examined while varying loads ranging from compressive to tensile. numerical analysis is based on a nonlinear equat...

Micromechanical structures have been designed, fabricated in silicon and tested for use as on-chip voltage reference. Applications are in electrical metrology and in integrated silicon microsystems. Microbeams of 100 μm length, 3 μm width and 11μm thickness are electrostatically actuated with a very reproducible pull-in voltage at 9.1 V. Devices demonstrated an initial drift of -12 mV over 10 d...