Silicon-MEMS gyroscope is an important part of MEMS ( Micro Electrical Mechanical System). There are some disturb ignored in traditional gyroscope that must be evaluated newly because of its smaller size (reach the level of micron). In these disturb, the air pressure largely influences the performance of the MEMS gyroscope. Different air pressure causes different gas damping coefficient for the...

This letter reports, for the first time, an integrated polysilicon microhemispherical resonating gyroscope (μHRG) with selfaligned drive, sense, and tuning electrodes, all fabricated using a single wafer process. The polysilicon hemispherical shell is 700 nm in thickness and 1.2 mm in diameter, resulting in a 1:3000 aspect ratio threedimensional (3-D) microstructure. The quality factor of the w...

This paper presents experimental results on the noise performance of an ultra high quality factor (Q-factor) micromachined silicon Quad Mass Gyroscope (QMG). The device was vacuum sealed at below 0.1mTorr in an LCC package with activated getters, demonstrating the Q-factor better than 1.7 million, along the drive and sense modes, at the 1.6 kHz center frequency. A bias stability of 0.09 deg/hr ...

This paper reports a novel four degree-of-freedom (DOF) MEMS vibratory gyroscope. A MEMS gyroscope array is then presented using the novel gyroscope unit. In the design of the proposed 4-DOF MEMS vibratory gyroscope, the elements of the drive-mode are set inside the whole gyroscope architecture, and the elements of sense-mode are set around the drive-mode, which thus makes it possible to combin...

the study of the dynamic behavior of a rigid body with one fixed point (gyroscope) has a long history. a number of famous mathematicians and mechanical engineers have devoted enormous time and effort to clarify the role of dynamic effects on its movement (behavior) – stable, periodic, quasi-periodic or chaotic. the main objectives of this review are: 1) to outline the characteristic features of...

This paper considers the problem of visual-inertial sensor fusion in the cooperative case and it provides new theoretical contributions, which regard its observability and its resolvability in closed form. The case of two agents is investigated. Each agent is equipped with inertial sensors (accelerometer and gyroscope) and with a monocular camera. By using the monocular camera, each agent can o...

A signal processing technique is presented to improve the angular rate accuracy of Micro-Electro-Mechanical System (MEMS) gyroscope by combining numerous gyroscopes. Based on the conditional correlation between gyroscopes, a dynamic data fusion model is established. Firstly, the gyroscope error model is built through Generalized Autoregressive Conditional Heteroskedasticity (GARCH) process to i...

The study of the dynamic behavior of a rigid body with one fixed point (gyroscope) has a long history. A number of famous mathematicians and mechanical engineers have devoted enormous time and effort to clarify the role of dynamic effects on its movement (behavior) – stable, periodic, quasi-periodic or chaotic. The main objectives of this review are: 1) to outline the characteristic features of...

This paper presents detailed performance status and projections for the silicon MEMS Quadruple Mass Gyroscope (QMG) – a unique high Q, lumped mass, mode-symmetric Class II Coriolis Vibratory Gyroscope (CVG) with interchangeable whole angle, self-calibration, and force rebalance mechanizations. Analysis of a QMG sealed without getter with a Q-factor of 1e3 reveals an Angle Random Walk (ARW) of 0...

The cylindrical resonator gyroscope (CRG) is a typical Coriolis vibratory gyroscope whose performance is mostly influenced by the damping characteristic of the cylindrical resonator. However, the tremendous damping influences caused by pasting piezoelectric electrodes on the gyroscope, which degrades the performance to a large extent, have rarely been studied. In this paper, the dynamical model...