This paper describes the development of an experimental platform which analyzes and controls the vibration of a Shape Memory Alloy (SMA) actuated and piezo sensed flexible beam. The vibration is controlled using the interactive force of a pair of almost identical SMA wires connected in an antagonistic manner, arranged in parallel to and on both sides of the cantilever beam structure. Data acqui...

Beam‐type substrate transport robots are widely used to handle substrates, especially in the solar cell manufacturing process. To reduce the takt time and increase productivity, accurate position control becomes increasingly important as the size of the substrate increases. However, the vibration caused by the flexible forks in beam‐type robots interferes with ...

This paper presents a point-to-point (PTP) motion control method to get accurate positioning and to suppress vibration of a vertical positioning system with a flexible beam. The proposed method is composed of a feedforward and feedback controller. The input preshaping based on the analytic modeling and the frequency equation of the system is proposed as a feedforward controller to produce desir...

This paper presents an implementation of a switching observer design strategy to a piece-wise linear beam system comprising a flexible steel beam with a one-sided support. The switching observer design strategy guarantees asymptotic stability of the estimation error. Experimental and simulation results are presented to demonstrate the observer error stability and performance. Copyright c 2005 I...

This paper aims at developing a force-guided microassembly technology with in-situ flexible polyvinylidene fluoride (PVDF) beam force sensing and hybrid force/position control based on an infinite dimensional model of the flexible sensor structure. Besides the designed 1-D PVDF cantilever based microforce sensor, as the soft sensor structure itself is installed at the free end of micromanipulat...

In this paper we propose an implicit force control scheme for a one-link flexible manipulator that interact with a compliant environment. The controller was based in the mathematical model of the manipulator, considering the dynamics of the beam flexible and the gravitational force. With this method, the controller parameters are obtained from the structural parameters of the beam (link) of the...

We report progress on the design of the RF systems for the Next LinearCollider (NLC) Damping Rings [1]. The 714MHz RF system is a critical component of the damping ring complex, and must provide flexible operation with high-power systems generating 1.5 MV in the main damping rings and 2 MV in the positron predamping ring. Average beam currents are approximately 750 mA, and bunch trains are rapi...