The demand for flexible and wearable sensors is increasing day by due to varied applications in the biomedical field. Especially highly sensitive are required detection of low signal from body. It important develop a pressure sensor that can convert maximum input into electrical output. In this paper, design performance graphene piezoresistive have been investigated zig–zag piezoresistors on sq...

In this paper modeling of capacitance and sensitivity for MEMS capacitive pressure sensor is presented. In capacitive sensor the sensitivity is proportional to deflection and capacitance changes versus pressure. Therefore first the diaphragm displacement, capacitance and sensitivity of sensor with square diaphragm have been modeled and then simulated using finite element method (FEM).  It can b...

Compared to autoclave-cured prepreg, liquid composite moulding (LCM) is a cost-effective alternative produce advanced composites, thanks the less-expensive intermediate materials, lower capital investment and shorter cycle time. A separate preforming step typically required within process chain convert 2D fabric blanks into complex 3D geometries before moulding. Numerical models are therefore i...

Accurate determination of the pull-in, or the collapse voltage is critical in the design process. In this paper an analytical method is presented that provides a more accurate determination of the pull-in voltage for MEMS capacitive devices with clamped square diaphragm. The method incorporates both the linearized modle of the electrostatic force and the nonlinear deflection model of a clamped ...

This paper proposes a Micro-electro-mechanical (MEMS) capacitive pressure sensor that relies on the movable electrode displaced like a flat plate equal to the maximum center deflection of diaphragm. The diaphragm, movable electrode and mechanical coupling are made of polysilicon, gold and Si3N4, respectively. The fixed electrode is gold and the substrate is Pyrex glass. This proposed method inc...

In this paper, a novel single-chip MEMS capacitive microphone is presented. The novelties of this method relies on the moveable aluminum (Al) diaphragm positioned over the backplate electrode, where the diaphragm includes a plurality of holes to allow the air in the gap between the electrode and diaphragm to escape and thus reduce acoustical damping in the microphone. Spin-on-glass (SOG) was us...

In most cases, structural engineers assume a concrete floor to be a rigid diaphragm. Although this simplification is in most cases acceptable, it should be noted that such an assumption may be distrusted due to certain problems. Concrete structures with staggered shear walls are among those whose analysis should be conducted with special concern for the behavior of their floor diaphragms. Howev...

The electromechanical analysis of a piezoresistive pressure microsensor with a square-shaped diaphragm for low-pressure biomedical applications is presented. This analysis is developed through a novel model and a finite element method (FEM) model. A microsensor with a diaphragm 1000 „m length and with thickness=400 µm is studied. The electric response of this microsensor is obtained with applyi...