Fine-grain thin superconducting films can be prepared by metalorganic Chemical Aerosol Deposition Technology (CADT). In this paper, we present the preparation and properties of YBa2Cu307_ x films on the different substrates, Si and SrTiO 3 (100). It is shown that the zero-resistance temperature (Tc,0) of the films on SrTiO 3 substrates is about 90 K, and the critical current density (Jc) at 77 ...

Some aspects of RF remote plasma enhanced CVD including the main features of the technique, possibilities of overcoming disadvantages typical for conventional plasma processes, and possible directions to improve the remote plasma method are discussed.

Silver containing nanocomposites receive increasing attention as antibacterial coatings. In this study we report on production of such materials using combination of gas aggregation sources of Ag nanoparticles and plasma enhanced chemical vapour deposition performed in HMDSO/O2 working gas mixtures. The main attention is devoted to the investigation of solubility of Ag nanoparticles in water in...

For wafer sizes in state-of-the-art semiconductor manufacturing ranging up to 300 mm, the uniformity of processes across the wafer becomes a very important issue. We present a fully three-dimensional model for the feature scale simulation of continuum transport and reaction determined high-pressure chemical vapor deposition processes suitable for the investigation of such nonuniformities. The n...