Abrasive wear is a mechanism that results in loss of material from the interaction surface with hard particles. This type frequently found machining tools. Microscale abrasion equipment often used to characterize resistance abrasive surface. The different parameters able control micro-abrasion tests, such as ball rotation, sliding distance between and sample, slurry concentration, normal load a...

Aluminium oxide (Al2O3), commonly known as alumina, is a widespread naturally occurring compound that has a broad range of industrial applications. Besides its use as a pigment or abrasive, alumina also plays a vital role as catalyst support for desulfurization or hydrogenation reactions. In the latter case, the active phase on the catalyst often consists of nickel metal nanoparticles. The inte...

AND CONCLUSIONS Chemical Mechanical Planarization (CMP) must continuously improve to meet the stringent requirements of next generation IC device manufacturing. Precision flow control of CMP slurry is critical to achieving a repeatable planarization process, minimizing slurry waste, and reducing cost-of-ownership (CoO). Monitoring and controlling slurry large particle concentration through filt...

Results from experiments on the removal of copper using chemical mechanical polishing ~CMP! by alumina abrasives suspended in deionized water are reported. The experiments were carried out in a benchtop polishing tool using IC1000 perforated pads and SUBA 500 pads. The removal rate was measured over a good range of values of the relative velocity and pressure, and for different values of the ab...

The use of hard and brittle material has become increasingly more extensive in recent years. Therefore processing of these materials for the parts fabrication has become a challenging problem. However, it is time-consuming to machine the hard brittle materials with the traditional metal-cutting technique that uses abrasive wheels. In addition, the tool would suffer excessive wear as well. Howev...

Elliptical elements are essential optical surfaces for modifying systems. For polishing the whole elliptical surface using doughnut-shaped MCF tool with variable tilt angle, an experimental investigation was conducted in this work. Firstly, a flat workpiece polished to determine feasibility. It found that middle portion of had optimal ability remove materials, and roughness Sa at material remov...

In chemical mechanical planarization, abrasive particles are pushed onto a wafer by a deformable pad. In addition to the pad–particle contact force, surface forces also act between the wafer and the particles. Experimental studies indicate the significance of slurry pH and particle size on the material removal rate MRR . In this work, a model for MRR, including the contact mechanics of multiple...

In transport of raw materials abrasive wear resistance is a requirement, which can be met with alumina ceramics. At certain locations additional impact load occurs, exacerbating the loss. As literature on impact-abrasive ceramics scarce this topic will researched in work. We selected variety commercial (90–96% Al2O3) and according to much more resistant – substantially expensive Zirconia Toughe...