Film properties of TaN-based metal (TaCN and TaSiN) have been precisely controlled for plasma enhanced ALD (PEALD) and thermal ALD with additives of N2 or NH3. Film resistivity (ρ) strongly depended on the nitrogen concentration of TaN-based metal. These films showed conformal step-coverage for high-aspect (>6) 50nm-wide trenches. Consequently, ALD TaN-based metal is promising for microelectron...

High permittivity (k) gate dielectric films are widely studied to substitute SiO2 as gate oxides to suppress the unacceptable gate leakage current when the traditional SiO2 gate oxide becomes ultrathin. For high-k gate oxides, several material properties are dominantly important. The first one, undoubtedly, is permittivity. It has been well studied by many groups in terms of how to obtain a hig...

Bimetallic AuPd nanoparticles supported on TiO2 are known to catalyze the reduction of NO with CO. Here, we investigated effects addition lanthanum oxide a AuPd/TiO2 catalyst particle size 2.1–2.2 nm. The La2O3 enhanced catalytic activity; for example, at 250 °C, there was 40.9% conversion and 49.3% N2-selectivity AuPd/TiO2, 100% AuPd-La (1:1)/TiO2. temperature requiring dropped from 400 °C 200...

Using a W-La2O3 gated MOSFET structure, we report the effect of substrate and gate injection of electrons on the breakdown and electrical degradation characteristics of the gate stack. Using the carrier separation measurement technique, we are able to identify the major contributor to leakage current under various stress conditions. By stressing nand p-channel MOSFETs with positive and negative...

CeO2-, ZrO2-, and La2O3-supported Rh-Pt catalysts were tested to assess their ability to catalyze the steam reforming of ethanol (SRE) for H2 production. SRE activity tests were performed using EtOH:H2O:N2 (molar ratio 1:3:51) at a gaseous space velocity of 70,600 h−1 between 400 and 700 °C at atmospheric pressure. The SRE stability of the catalysts was tested at 700 °C for 27 h time on stream ...

The optimal process parameters of ultrasonic-assisted processing were studied to further improve the molding quality and mechanical properties Ni60/WC-TiO2+La2O3 composite coating. A single-factor experiment was used explore influences ultrasonic vibration frequencies on microstructure, elemental composition, phase hardness, wear resistance coating using scanning electron microscopy (SEM), an X...