s With the advancements of MEMS foundry services and CAD tools, MEMS devices can be costeffectively designed and prototyped. Here, four designs that utilize these tools are presented: 1) a flexure design used to reduce the device warpage resulting from the mismatch in thermal expansion coefficients between the device and the substrate for flip-chip bonded MEMS, 2) a digitally positioned micro-m...

The MEMS (Micro-Electronical Mechanical System) scanning mirror is an optical MEMS device that can scan laser beams across one or two dimensions. MEMS scanning mirrors can be applied in a variety of applications, such as laser display, bio-medical imaging and Light Detection and Ranging (LiDAR). These commercial applications have recently created a great demand for low-driving-voltage and low-p...

RF MEMS capacitive switches capable of orderof-magnitude impedance changes have demonstrated operating lifetimes exceeding 100 billion switching cycles without failure. In situ monitoring of switch characteristics demonstrates no significant degradation in performance and quantifies the charging properties of the switch silicon dioxide film. This demonstration leads credence to the mechanical r...

Microelectromechanical System (MEMS) and microfabrication have experienced phenomenal growth over the past few years, and have had tremendous impact on and have also led to major breakthroughs in information technology, computers, medicine, health, manufacturing, transportation, energy, avionics, security, etc. Development of MEMS is multiphysics in nature and is based upon fundamental theory, ...

MicroElectroMechanical Systems (MEMS) are becoming increasingly important. The benefits of MEMS include small size, low weight, and low cost. In addition, Radio Frequency MEMS switches offer low insertion loss, high quality factor, low power, high isolation, and broadband frequency performance. Modeling of electrostatically-actuated, capacitive switches is reviewed and fabrication steps are des...

Process design, development and integration to fabricate reliable MEMS devices on top of VLSI-CMOS electronics without damaging the underlying circuitry have been investigated throughout this dissertation. Experimental and theoretical results that utilize two " Post-CMOS " integration approaches will be presented. The first integration approach uses SiGe MEMS technology for the " Post-CMOS " mo...

Microelectromechanical Systems (MEMS) is the technology of the very small, and merges at the nano-scale into "Nanoelectromechanical" Systems (NEMS) and Nanotechnology. MEMS are also referred to as micro machines, or Micro Systems Technology (MST). MEMS are separate and distinct from the hypothetical vision of Molecular nanotechnology or Molecular Electronics. MEMS generally range in size from a...

UNLABELLED The utility of micro-electro-mechanical sensors (MEMS) for application in air-coupled (contactless or noncontact) sensing to concrete nondestructive testing (NDT) is studied in this paper. The fundamental operation and characteristics of MEMS are first described. Then application of MEMS sensors toward established concrete test methods, including vibration resonance, impact-echo, ult...