The measurement of machined surfaces directly on ultra-precision turning machines yields to notable advantages, e.g. in correcting formdeviations without re-clamping. In the present work, a one-dimensional probe is moved by machine axes optically scan workpiece. integration and positioning methodology within tool coordinate system as well simulation model are presented. Simulations experiments ...

This paper describes an ultra precision polishing method of aspherical mirrors, and the fundamental research on polishing characteristics. The aspherical mirrors with a diameter of about 30mm made by fused silica glass and CVD-SiC were ELID (electrolytic in-process dressing)-ground to high form accuracy with #4000 cast iron bonded diamond wheel, and then polished with a small polishing tool. As...

Computer Controlled Ultra-precision Polishing (CCUP) provides an enabling technology for machining freeform components with optical surface quality (i.e., nanometer surface roughness and sub-micrometer or accuracy). It can be used to machine difficult-to-machine materials such as optical glass which are not amenable for diamond machining. Due to the complexity of material removal mechanism in t...

1.1 Ultra-precision moving positioning stage A typical ultra-precision moving positioning stage is often used in ultra-precision manufacturing system for its nanometer displacement and fast linear moving speed. Usually, such platform consists of electric amplifiers, piezoelectric actuators and loads. As hysteresis is inherent in piezoelectric actuator, the amplifier and load can be considered a...