Porous silicon seems to be an appropriate material platform for the development of high-sensitivity and low-cost optical sensors, as their porous nature increases the interaction with the target substances, and their fabrication process is very simple and inexpensive. In this paper, we present the experimental development of a porous silicon microcavity sensor and its use for real-time in-flow ...

A methanol microsensor integrated with a micro heater manufactured using the complementary metal oxide semiconductor (CMOS)-microelectromechanical system (MEMS) technique was presented. The sensor has a capability of detecting low concentration methanol gas. Structure of the sensor is composed of interdigitated electrodes, a sensitive film and a heater. The heater located under the interdigitat...

Silicon Carbide is often proposed as a sensor material for use in harsh environment applications such as monitoring gas turbines and internal combustion engines. However, little SiC survivability research has been reported for these environments. In this work, data is reported for silicon and amorphous silicon carbide (a-SiC) coated die survivability in a combustion engine with an exhaust tempe...

A hybrid tactile sensor system is proposed for a robot hand to hold and grip an object adaptively as the sensor system measures the slip of an object, the gripping force, and the deformation of its silicon rubber sensor element. A hybrid tactile sensor system consists of a Carbon Micro‐Coil (CMC) touch sensor and a force sensor. The CMC sensor element is made of silicon...

This study investigates the design and fabrication of magnetic microsensors using the commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process. The magnetic sensor is composed of springs and interdigitated electrodes, and it is actuated by the Lorentz force. The finite element method (FEM) software CoventorWare is adopted to simulate the displacement and capacitance of the magn...

Abstract: The LC resonator-based passive pressure sensor attracts much attention because it does not need a power source or lead wires between the sensing element and the readout system. This paper presents the design and manufacturing of a passive pressure sensor that contains a variable capacitor and a copper-electroplated planar inductor. The sensor is fabricated using silicon bulk micro-mac...

Sensors based on the giant magnetoimpedance (GMI) effect in silicon steelswere constructed. Strips of silicon steels (0.500 mm-thick, 35.0 mm-long) with widthsranging from 0.122 to 1.064 mm were cut from recycled transformer cores. Since amaximum GMI ratio of 300% and a maximum field sensitivity of 1.5%/Oe were observedin a 1.064 mm-wide sample at 200 kHz, the 1.064 mm-wide strips were chosen a...