Thermal-actuation and piezoresistive-detection effects have been employed to pump the effective quality factor of MEMS resonators, targeting better mass sensing performance in air. In this paper, frequency resolution (bias instability) a thermal-piezoresistive resonator operating air at room temperature is experimentally investigated. It found that dynamic range decreases when increasing bias d...

We present two oscillation control algorithms for resonant sensors such as vibratory gyroscopes. One control algorithm tracks the resonant frequency of the resonator and the other algorithm tunes it to the specified resonant frequency by altering the resonator dynamics. Both algorithms maintain the specified amplitude of oscillations. The stability of each of the control systems is analyzed usi...

The influence of the beam geometry on the quality factor and resonance frequency of resonant silicon cantilever beams vibrating in their fundamental in-plane flexural mode in water has been investigated. Compared to cantilevers vibrating in their first out-of-plane flexural mode, utilizing the in-plane mode results in reduced damping and reduced mass loading by the surrounding fluid. Quality fa...

Two wireless, passive remote query magnetism-based glucose sensors, which operate in combination with a mass and volume changing glucose responsive polymer, are presented. One sensor design is based upon the magnetostatic coupling of magnetically soft thin-film elements; as the polymer volume changes in response to glucose concentration so does the magnetostatic coupling between elements. In re...

Micro- and nanoelectromechanical systems, including cantilevers and other small scale structures, have been studied for sensor applications. Accurate sensing of gaseous or aqueous environments, chemical vapors, and biomolecules have been demonstrated using a variety of these devices that undergo static deflections or shifts in resonant frequency upon analyte binding. In particular, biological d...

In this work a magnetoelectric (ME) current sensor design based on a magnetoelectric effect is presented and discussed. The resonant and non-resonant type of ME current sensors are considered. Theoretical calculations of the ME current sensors by the equivalent circuit method were conducted. The application of different sensors using the new effects, for example, the ME effect, is made possible...

This work details a preliminary analytical and experimental investigation of a new class of resonant, single input single output (SISO) microsensors, which are capable of detecting multiple analytes. The key feature of these sensors is that they exploit vibration localization in a set of N microbeams, coupled indirectly through a common shuttle mass, to allow for the detection of N distinct res...

We designed and fabricated a new sensing system which consists of two virtual impactors and two quartz-crystal microbalance (QCM) sensors for measuring particle mass concentration and size distribution. The virtual impactors utilized different inertial forces of particles in air flow to classify different particle sizes. They were designed to classify particle diameter, d, into three different ...