This paper describes the fabrication and characterization of a wireless pressure sensor for smart stent applications. The micromachined pressure sensor has an area of 3.13 × 3.16 mm² and is fabricated with a photosensitive SU-8 polymer. The wireless pressure sensor comprises a resonant circuit and can be used without the use of an internal power source. The capacitance variations caused by chan...

PURPOSE To determine the effect of pulsatile motion of graft-attached pressure sensors on the accuracy of aneurysm sac pressure measurement. METHODS Pressure inside a pressure box was measured with a sensor attached to a stent-graft (Sensorgraft) facing a sensor in fixed position (Sensorbox). Maximum inter-sensor variation of Sensorgraft and Sensorbox was determined in static experiments. Exp...

This paper presents design and assembly of mixed electronic circuitry for measured signal processing of the capacitive difference pressure sensor, as well as analysis of the obtained results. The smart pressure sensor provides values of measured pressure via 4 20 mA current loop output. The loop current is also used for sensor circuitry supplying. This means that current consumption of the whol...

This paper presents the simulation, fabrication and characterization of a microFET (field effect transistor) pressure sensor with readout circuits. The pressure sensorincludes 16 sensing cells in parallel. Each sensing cell that is circular shape is composed ofan MOS (metal oxide semiconductor) and a suspended membrane, which the suspendedmembrane is the movable gate of the MOS. The CoventorWar...

Bulk micromachined piezoresistive pressure sensor was designed, fabricated, packaged, and tested at RIT laboratory facility. Every aspect of the fabrication is studied thoroughly and used as an educational tool in better understanding the fabrication of MEMs devices.

This paper presents a comparative study of pressure-sensitive sensor materials being suitable for monitoring purposes in pressure mapping sensor networks. Four sensor materials working on piezoresistive, piezoelectric, quasi-piezoelectric and capacitive principle have been discussed including the built-up, the working principle, the manufacturing and the most important properties. Additionally,...

A novel gas-sealed capacitive pressure sensor with a temperature compensation structure is reported. The pressure sensor is sealed by Au-Au diffusion bonding under a nitrogen ambient with a pressure of 100 kPa and integrated with a platinum resistor-based temperature sensor for human activity monitoring applications. The capacitance-pressure and capacitance-temperature characteristics of the ga...

Dynamic calibration is one of the important ways to acquire the dynamic performance parameters of a pressure sensor. This research focuses on the processing method for the output of calibrated pressure sensor, and mainly attempts to solve the problem of extracting the true information of step response under strong interference noise. A dynamic calibration system based on a shock tube is establi...