نتایج جستجو برای: nano metrology

تعداد نتایج: 55232  

2017
Alessandro Ferrero Veronica Scotti

Measurements play a fundamental role in nowadays forensic activities, especially in criminal justice. Guilt or innocence and the severity of a sentence do often depend upon the results of measurements. On the other hand, it is well-known that measurement results are always affected by uncertainty, so that any decision based on measurement results carries an implicit risk of being wrong: uncerta...

Journal: :Optics express 2014
Peter Hermann Arne Hoehl Georg Ulrich Claudia Fleischmann Antje Hermelink Bernd Kästner Piotr Patoka Andrea Hornemann Burkhard Beckhoff Eckart Rühl Gerhard Ulm

We describe the application of scattering-type near-field optical microscopy to characterize various semiconducting materials using the electron storage ring Metrology Light Source (MLS) as a broadband synchrotron radiation source. For verifying high-resolution imaging and nano-FTIR spectroscopy we performed scans across nanoscale Si-based surface structures. The obtained results demonstrate th...

Jones matrix computation is one of the widely used methods in nonlinearitycalculation in laser interferometers. In this paper, the nonlinearity error in developedthree-longitudinal mode heterodyne interferometer (DTLMI) has been mathematicallymodeled at various speeds, by using Jones matrix calculations. This review has been donedespite the fact that simultaneously the main factors including no...

Journal: :Optics express 2017
Xiaosi Xu A P Konijnenberg S F Pereira H P Urbach

Coherent Fourier scatterometry is an optical metrology technique that utilizes the measured intensity of the scattered optical field to reconstruct certain parameters of test structures written on a wafer with nano-scale accuracy. The intensity of the scattered field is recorded with a camera and this information is used to retrieve the grating parameters. To improve sensitivity in the paramete...

2014
Lin Hu Jin Zhao Jinlong Yang

We propose the nano-scale displacement sensor with high resolution for weak-force systems could be realized based on vertical stacked two-dimensional (2D) atomic corrugated layer materials bound through Van der Waals (VdW) interaction. Using first-principles calculations, we found the electronic structure of bi-layer blue phosphorus (BLBP) varies appreciably to both the lateral and vertical int...

2012
Andy Fox D R Hines Teng Li

Determining the interfacial adhesion of ultrathin functional films in micro-electro-mechanical systems (MEMS) and nano-electro-mechanical systems (NEMS) becomes increasingly crucial for optimal design of MEMS/NEMS devices. However, direct measurement of adhesion properties of ultrathin films can be challenging, as the traditional metrology of adhesion at macroscopic scales becomes unsuitable in...

2014
Guanghui Yuan Edward T. F. Rogers Tapashree Roy Giorgio Adamo Zexiang Shen Nikolay I. Zheludev

Planar optical lenses are fundamental elements of miniaturized photonic devices. However, conventional planar optical lenses are constrained by the diffraction limit in the optical far-field due to the band-limited wavevectors supported by free-space and loss of high-spatial-frequency evanescent components. As inspired by Einstein's radiation 'needle stick', electromagnetic energy can be delive...

Journal: :Automatica 2021

This paper proposes a novel, observer-based, nonlinear control strategy aimed at facilitating the pursuit of nanomechanical measurements within noisy environments industrial production lines. The investigation makes use laboratory-prototype emulating an architecture composed by sample to be analyzed, and metrology platform whose task is carry out in-line measurements, while whole system being a...

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