The paper demonstrates reduced order modeling (ROM) of the strongly coupled system level dynamic analysis of micro electro mechanical systems (MEMS) by lumped finite elements (FE) and substructuring implemented in the ANSYS/Multiphysics program. Index terms Micro Electromechanical Systems (MEMS), Finite elements (FE), Coupled analysis, Reduced order modeling (ROM)

Due to the advances in the Micro-electro-Mechanical systems (MEMS) and low power integrated circuits, digital electronics gave rise to the development of micro sensors (Sohrabi,2000)[12]. In the past few years there was a great research done by Kanchan Verma Dept. of Computer science and engineering, Punjab Institute of Technology (PTU main campus) Kapurthala, (INDIA) E-mail: kanchanverma252@gm...

The paper demonstrates reduced order modeling (ROM) of the strongly coupled system level dynamic analysis of micro electro mechanical systems (MEMS) by lumped finite elements (FE) and substructuring implemented in the ANSYS/Multiphysics program. Index terms Micro Electromechanical Systems (MEMS), Finite elements (FE), Coupled analysis, Reduced order modeling (ROM)

Carcinomas are the most commonly diagnosed cancers originating in the skin, lungs, breasts, pancreas, and other organs and glands. In most of the cases, the microenvironment within the tissue changes with the progression of disease. A key challenge is to develop a device capable of providing quantitative indicators in diagnosing cancer by measuring alteration in electrical and mechanical proper...

MEMS (Micro-electro-mechanical systems) have shown promise for optical crossconnects in WDM networks. We will describe various MEMS optical-switching technologies, their successes in implementing important optical-networking functionalities, and future perspectives.

The Pb(Zr, Ti)O3 (PZT) based micro electro mechanical systems are presented. Piezoelectric effect, basic piezoelectric equations are explained. Lost silicon mold process for PZT microstructures, PZT thin film deposition, and PZT based piezoelectric micromachined switch device are discussed.