Silicon-MEMS gyroscope is an important part of MEMS ( Micro Electrical Mechanical System). There are some disturb ignored in traditional gyroscope that must be evaluated newly because of its smaller size (reach the level of micron). In these disturb, the air pressure largely influences the performance of the MEMS gyroscope. Different air pressure causes different gas damping coefficient for the...

We present long-term bias drift compensation in high-quality (Q) factor MEMS gyroscopes using real-time temperature selfsensing. The approach takes advantage of linear temperature dependence of the drive-mode resonant frequency for selfcompensation of temperature-induced sense-mode drifts. The approach was validated by a vacuum packaged silicon quadruple mass gyroscope, with signal-to-noise rat...

Obtaining the approximation of rotation rate form a Z-Axis MEMS gyroscope is a challenging problem. Currently, most commercially available MEMS gyroscopes are operating in an open-loop for purposes of simplicity and cost reduction. However, MEMS gyroscopes are still fairly expensive and are not robust during operation. The purpose of this research was to develop a high-performance and low-cost ...

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With the development of designing and manufacturing level for micro-electromechanical system (MEMS) gyroscopes, control circuit has become a key point to determine their internal performance. Nevertheless, phase delay electronic components may result in some serious hazards. This study described real-time correction MEMS vibratory gyroscopes. A detailed theoretical analysis was provided clarify...

Our previous work demonstrated the advantages of MEMS vibratory gyroscopes with 1 degree of freedom (DOF) drive and 2-DOF sense modes which were shown to be robust to temperature drifts. These devices were designed with frequencies below 1 kHz; many applications, however, require gyroscopes with operational frequencies above 1 kHz for the rejection of ambient vibrations. This paper discusses th...

We present an adaptive algorithm for a system integrated with micro-electro-mechanical systems (MEMS) gyroscopes and a compass to eliminate the influence from the environment, compensate the temperature drift precisely, and improve the accuracy of the MEMS gyroscope. We use a simplified drift model and changing but appropriate model parameters to implement this algorithm. The model of MEMS gyro...

Micromachined gyroscopes for measuring rate or angle of rotation have attracted a lot of attention during the past few years for several applications. They are widely used to detect orientation in space, including automotive applications for ride stabilization and rollover detection; some consumer electronic applications, such as video-camera stabilization, virtual reality, and inertial mouse f...

This paper reports a non-contact experimental characterization of resonant modes in micromachined spherical shells fabricated by pressure and surface tension driven plastic deformation (glassblowing). For a glass-blown shell with 0.9 mm diameter and 10 μm average thickness, dynamically balanced 4and 6-node vibratory modes were identified at 1.27 MHz and 1.44 MHz, respectively. Without any trimm...

The MEMS gyroscope zero drifts dominantly affects measurement accuracy of gyroscope. For the nonlinear problem that MEMS gyro zero drift varying with the temperature changes, the wavelet transform was performed to filter the static experiment zero drift data, then the zero drift was investigate by combing with the improved grey prediction theory. Finally a temperature compensation model based o...