RF MEMS capacitive switches show great potential for use in wireless communication device. However, their widespread insertion in commercial products requires further improvements in their longterm reliability. Dielectric charging is one of the factors that impact switch reliability. Dielectric charging is understood to mean the accumulation of electric charge in the insulating dielectric layer...

A coplanar waveguide (CPW) single-pole double-throw (SPDT) X-band RF MEMS switch that can be actuated between states by applying a single voltage is introduced. Since a signal can be transmitted to one of the output ports without biasing, this has the potential to reduce the complexity of the required biasing network. The switch consists of a series and a shunt capacitive MEMS switch separated ...

This paper presents a low-actuation-voltage micro-electromechanical system (MEMS) capacitive shunt switch which has a very large bandwidth (4 GHz to 24 GHz). In this work, the isolation of MEMS switch is improved by adding two short high impedance transmission lines at the beginning and end of a coplanar waveguide (CPW). Simulating the switch demonstrates that a return loss (S11) is less than -...

In this work, a study of MEMS (Micro electro mechanical system) and SUGAR simulator is presented. A MEMS power switch is implemented and the insertion loss, return loss with respect to frequency and ON and Off states of these loss with respect to frequency is studied. Ultra low ON state insertion loss, high off state isolation and high RF signal power handling characteristics are achieved .Many...

The application of Micro Electro Mechnical Switch (MEMS) technology to Electronically Scanned Arrays (ESAs) provides the potential for significantly reducing the volume, weight, cost, and power consumption of antennas for both radar and communications systems. This paper addresses the current and projected status of Radio Frequency (RF) MEMS technology and assesses the potential benefits of MEM...

In this paper, a robust PID control scheme is proposed for Micro-Electro-Mechanical-Systems (MEMS) optical switches. The proposed approach is designed in a way which solves two challenging and important problems. The first one is successful reference tracking and the second is mitigating the system nonlinearities. The overall system composed of nonlinear MEMS dynamics and the PID controller is ...

This paper presents a novel RF MEMS (Micro Electromechanical System) fixed-fixed switch for very fast switching. Using the obtained equations, the switching time depends on the stiffness and effective mass of the switch beam so that the switching time will be decreased by higher stiffness (spring constant) and lower effective mass. In new design, the suspension bridge is a three-layer beam so t...

We have developed novel optical micro-electro-mechanical systems, (MEMS) and nano-electro-mechanical, (NEMS) optical components for applications including imaging, switching, and optical integrated circuits. This paper provides an overview of current optical MEMS/NEMS research projects in our integrated photonics laboratory at UCLA. Three optical MEMS/NEMS devices: a large, 1 mm diameter, scann...

RF MEMS is a key enabling device technology with the potential for significant performance, cost, and integration benefits to communications and radar applications. An overview of MEMS RF switches and tunable capacitors is presented, with examples of device technologies developed at RSC. Examples of MEMS-based circuits, including tunable filters and phase shifter circuits, are provided to illus...