Curriculum development in microelectromechanical systems (MEMS) in the Mechanical Engineering and Applied Mechanics (MEAM) Department at the University of Michigan is presented. A course curriculum structure that integrates both mechanical and electrical engineering courses is proposed for mechanical engineering students. The proposed curriculum starts from undergraduate study and finishes at t...

Getting Micro-Electro-Mechanical Systems (MEMS) out of a wafer after fabrication processes is of great interest in testing, packaging or simply using these devices. Actual solutions require special machines like wafer dicing machines, increasing time and cost of de-tethering MEMS. This article deals with a new solution for manufacturing mechanical de-tetherable silicon MEMS. The presented solut...

The silicon-based MEMS fabrication technology, including bulk micromachining and sacrificial layers technology have been developed and studied. The 3-D fabrication and integration of silicon-based MEMS and standard process fabrication have been studied in the present paper. 1 Introduction MEMS devices and systems offer advantages of small volume, light weight, low power, and the integration of ...

To solve the coupling and optimizing problems in MEMS designing and analyzing process, the paper mainly put forward to the uniform model construction simulation method. The method adopt uniform constraints to describe MEMS multi-fields simulation model, firstly construct MEMS model library which includes structure, electricity, magnetic, thermal and fluid elements in multi-field uniform languag...

Fingerprint identification system is mainly consisted of fingerprint achieving, fingerprint classification and fingerprint matching. Fingerprint matching is the key to the system and effects on the precision and efficiency of the whole system directly. Fingerprints are matched mainly based on their fingerprint texture pattern which can be described with the orientation field of fingerprints. A ...

Fingerprint identification is divided into fingerprint pretreatment, fingerprint feature extract ion and a fingerprint match. Based on embedded technology and fingerprints processing algorithms, embedded automatic fingerprint identification system fingerprint identification of various processes study the algorithm, this paper expounds the characteristics of various algorithm with using details.

Fingerprint ridge frequency is a global feature, which is most prominently different in fingerprints of men and woman, and it also changes within the maturing period of a person. This paper proposes the method of fingerprint pre-classification, based on the ridge frequency replacement by the density of edge points of the ridge boundary. This method is to be used after applying the common steps ...

An overview of the MEMS technology development and applications is given in this paper. A special attention is paid to the RF MEMS switches. Both series and shunt MEMS switches have been considered. It is also presented a technique for modeling and design of inductively-tuned MEMS shunt switch. Some very important issues for the device maturity e.g. reliability and packaging have been addressed.

For more than two decades, intensive worldwide MEMS research and development have led to widespread applications of MEMS-based devices in consumer, industrial, and military products. Harnessing of MEMS technology enabled the birth of pressure sensors, accelerometers, gyroscopes, print heads, optical switches for rapid communications and, recently, the bio-chips for life science applications. Su...