This paper reports on the fabrication and characterization of a Complementary Metal Oxide Semiconductor-Microelectromechanical System (CMOS-MEMS) device with embedded microheater operated at relatively elevated temperatures (40 °C to 80 °C) for the purpose of relative humidity measurement. The sensing principle is based on the change in amplitude of the device due to adsorption or desorption of...

Relative humidity sensors are common components in building heating, ventilating, and air-conditioning (HVAC) systems, and their performance can significantly impact energy use in these systems. A study was undertaken to test and evaluate the most commonly used relative humidity sensors in building HVAC systems, namely the capacitive and resistive types. Sensor models from six different manufac...

An integrated humidity sensor system with nano-structured carbon nitride film as humidity sensing material is fabricated by a 0.8 μm analog mixed CMOS process. The integrated sensor system consists of differential humidity sensitive field effect transistors (HUSFET), temperature sensor, and operational amplifier. The process contains two poly, two metal and twin well technology. To form CNx fil...

Sensors & Transducers Journal (ISSN 1726-5479) is a peer review international journal published monthly online by International Frequency Sensor Association (IFSA). Available in electronic and CD-ROM. Abstract: Porous silicon (PS) sensor based on capacitive technique used for measuring relative humidity has the advantages of low cost, ease of fabrication with controlled structure and CMOS compa...

in this paper, a novel method of producing bi-metallic alloy nanoparticles at low temperatures using hydrogen bombardment of thin films, deposited on glass substrates, is introduced. optical and morphological characteristics of the nanoparticles were extensively studied for various conditions of plasma treatment, such as plasma power density, temperature, duration of hydrogen bombardment, thick...

In this study, a high-sensitivity and low-hysteresis porous metal-insulator-metal-type capacitive humidity sensor is investigated using a functional polymer mixed with TiO2 microparticles. The humidity sensor consists of an optimally designed porous top electrode, a functional polymer humidity sensitive layer, a bottom electrode, and a glass substrate. The porous top electrode is designed to in...

A humidity sensor thin film based on nanoporous PbWO4-WO3 composites has been prepared by spin coating technique with different weight ratio of PbWO4 (Pb) and WO3 (WO) (PWWO-01, PWWO-82, PWWO-64, PWWO-46, PWWO-28, PWWO-01) and their humidity sensing properties have also been investigated at different relative humidity (RH) in the range of 5% - 98% at room temperature with dc resistance. It is f...

This study presents the fabrication and characterization of a humidity microsensor that consists of interdigitated electrodes and a sensitive film. The area of the humidity microsensor is about 2 mm(2). The sensitive film is polyaniline doping polyvinyl alcohol (PVA) that is prepared by the sol-gel method, and the film has nanofiber and porous structures that help increase the sensing reaction....

A fully-integrated complementary metal-oxide semiconductor (CMOS) sensor for combined temperature and humidity measurements is presented. The main purpose of the device is to monitor the hermeticity of micro-packages for implanted integrated circuits and to ensure their safe operation by monitoring the operating temperature and humidity on-chip. The smart sensor has two modes of operation, in w...

Incidents of injuries caused by tiles falling from building exterior walls are frequently reported in Taiwan. Humidity is an influential factor in tile deterioration but it is more difficult to measure the humidity inside a building structure than the humidity in an indoor environment. Therefore, a separable microsensor was developed in this study to measure the humidity of the cement mortar la...