While ceramics are important materials for electronic and microsystem packaging, they are difficult to pattern lithographically. LEEDUS, a fabrication process combining lithography, electroplating, batch mode micro electro-discharge machining (µEDM) and batch mode micro ultrasonic machining (µUSM), is presented in this paper. This technology provides die-scale pattern transfer capability from l...

Wire electro-discharge machining (WEDM) is a fully extended and competitive machining process widely used for hard and difficult to machine materials. In the present research, experimental investigation have been conducted to find out the wire wear rate at different machining parameter Such as peak current, pulse on time, pulse off time, based on full factorial design of experiment. Molybdenum ...

In this paper, the cutting of Tungsten Carbide ceramic using electro-discharge machining (EDM) with a graphite electrode by using Taguchi methodology has been reported. The Taguchi method is used to formulate the experimental layout, to analyse the effect of each parameter on the machining characteristics, and to predict the optimal choice for each EDM parameter such as peak current, voltage, p...

This paper reports a self-aligned three-dimensional process (3D-SOULE) that incorporates batch-mode micro ultrasonic machining (μUSM), lapping and micro electro-discharge machining (μEDM) for fabrication of concave and mushroom-shaped spherical structures from hard and brittle materials. To demonstrate the process, 1 mm structures are fabricated from glass and ruby spheres. The μEDM technique i...

Batch mode micro-electro-discharge machining ( EDM) is a lithography-compatible microfabrication method suitable for making devices from bulk metals, including stainless steel. In high-density patterns, spurious discharges through debris can cause workpiece edge rounding, fast tool wear, and mushroom-shaped metal recasting of the tool. This paper reports a Si coating technique that acts as a di...