axial distributions of plasma and floating potentials, electron number density and the electron energy distribution function (eedf) have been measured in the double layer (dl) region of an he discharge constriction. excitation processes in the constriction region are studied. using a linearization method for the nonstationary balance equations and choosing appropriate discharge conditions, the ...

Inductively Coupled Plasmas (ICPs) can be maintained over a wide range of driving frequencies, from 50 Hz to GHz. We have investigated the specifics of ICP operation at different frequencies which address: a) nonlinear plasma dynamics due to the disparity of time scales for ion transport and electron energy relaxation, b) the absence of time-varying magnetic field in plasma for certain ICP conf...

in the present paper axial distributions of plasma and floating potentials, electron and iondensities and eedf have been measured in the dl region of a hg discharge constriction. an attempt hasbeen made for the resolution of opposing charged layer structures in dl. excitation processes in theconstriction region are studied. using the linearization method for the nonstationary balance equationss...

Measurements of electron temperatures Te and electron energy distribution functions EEDFs in a dual frequency capacitively coupled etcher were performed by using trace rare gas optical emission spectroscopy TRG-OES . The parallel plate etcher was powered by a high frequency 60 MHz “source” top electrode and a low frequency 13.56 MHz “substrate” bottom electrode. Te first increased with pressure...

Rate coefficients for electron-impact dissociation of O3 + to the O+ and O2 fragments are calculated new, recommended cross section data set various collisional conditions. Two sets data, measured recently by different experimental groups, used. These sections differ significantly with each other, but renormalized optimized coherent base. ozone cation fragmentation determined using Maxwellian n...

A numerical tool for analysing spatially anisotropic electron populations in cyclotron resonance (ECR) plasmas has been developed, using a trial-and-error energy distribution function (EEDF) fitting method. The method tested on space-resolved warm electrons the range $2-20\,\mathrm{keV}$, obtained from self-consistent simulations modelling only dynamics ECR devices, but lacked real-world valida...

Abstract A new actinometry approach, helium state enhanced (SEA), is presented. This diagnostic uses the emission of atomic states O(3p 3 P) ( λ = 844.6 nm), Ar(2p 1 ) 750.4 nm) and He(3 S) 706.5 allows oxygen density mean electron energy to be determined simultaneously from spectral line intensity ratios. Here, are selected in a way that they cover wide range distribution function (EEDF). The ...