We report on a novel capacitive detection principle for Coriolis mass flow sensors which allows for one order of magnitude increased sensitivity. The detection principle consists of two pairs of comb-structures: one pair produces two signals with a phase shift directly dependent on the mass flow, the other pair is used to cancel the actuation signal. This results in larger phase shifts for the ...

In this paper the quantitative influence of external vibrations on the measurement value of a Coriolis Mass-Flow Meter for low flows is investigated, with the eventual goal to reduce the influence of vibrations. Model results are compared with experimental results to improve the knowledge on how external vibrations affect the measurement error. A Coriolis Mass-Flow Meter (CMFM) is an active dev...

0167-9317/$ see front matter 2012 Elsevier B.V. A http://dx.doi.org/10.1016/j.mee.2012.02.022 ⇑ Corresponding author. Tel.: +82 31 219 2488; fax E-mail address: [email protected] (K. Lee). This study proposes a new dual-axis sensing gyroscope based on SAW (surface acoustic wave), in which two substrates are bonded together and completely sealed. The gyroscope on the bottom substrate is used fo...

effects of hall current, ion-slip and coriolis force on unsteady mhd couette-hartmann flow of a viscous incompressible electrically conducting fluid through a porous medium bounded by porous plates in the presence of a uniform transverse magnetic field which is either fixed relative to the fluid or to the moving porous plate is investigated using laplace transform technique. the expressions for...

As dust settles in a protoplanetary disk, a vertical shear develops because the dust-rich gas in the midplane orbits at a rate closer to true Keplerian than the slower-moving dust-depleted gas above and below. A classical analysis (neglecting the Coriolis force and differential rotation) predicts that Kelvin-Helmholtz instability occurs when the Richardson number of the stratified shear flow is...

An interface for MEMS gyroscope is implemented in 0.18μm HVCMOS technology, and achieves a low noise floor of 1m°/sec/ Hz over 200Hz BW. Electromechanical forcefeedback and self-clocking scheme based on gyro resonance are implemented. The interface includes on-chip reference generation, decimation, and temperature compensation. Keywords-gyroscopes; Sigma delta modulation; Force feedback; Self-c...