The expending development of wireless communication requires strong demands for components with improved capabilities. RF MEMS devices offer a variable alternative to conventional communication components because they consume less DC power, have lower losses, higher linearity and higher Q factor. However, the commercialization of RF MEMS devices is hindered by technological issues such as their...

This paper presents a new monolithic microwave integrated circuit (MMIC) based on coplanar waveguide (CPW) design for a tunable resonator based on RF MEMS. This RF structure, which can be used for system on chip (SOC), is constituted with MEMS Bridge placed between two meander inductors and the tenability is controlled by a variable applied DC voltage. Moreover, this device presents a compactne...

The expending development of wireless communication requires strong demands for components with improved capabilities. RF MEMS devices offer a variable alternative to conventional communication components because they consume less DC power, have lower losses, higher linearity and higher Q factor. However, the commercialization of RF MEMS devices is hindered by technological issues such as their...

As RF technologies mature designing complex RF systems is becoming an increasingly difficult task. Modern systems include components that cannot be modeled with traditional simulators. This paper introduces a modeling technique for use in RF systems that combines Maxwell’s, mechanical, and solid-state equations. The resulting simulator can be used to simulate microelectromechanical structures (...

This paper presents a study of RF MEMS switch designed to be integrated in tunable filters for applications from W-frequency band to V-frequency band. Along the whole process, we go into detail of each procedure to present a complete study from design to fabrication and characterization of a RF-MEMS switch. The proposed concepts are validated by experimental results.

MIM capacitors are considered equally important devices for the assessment of dielectric charging in RF MEMS capacitive switches. Beside the obvious similarities between the down state condition of RF MEMS and MIM capacitors there are also some important differences. The paper aims to introduce a novel approach to the study of dielectric charging in MEMS with the aid of MIM capacitors by combin...

In this paper we present our efforts in characterizing and optimizing the influence of a Wafer-Level Packaging (WLP) solution on the electromagnetic behaviour of RF-MEMS devices. To this purpose, a fully parameterized FEM model of a packaged Coplanar Waveguide (CPW) is presented in order to optimize all the technology degrees of freedom (DoF’s) made available by the fabrication process of the c...

In this paper, we reviewed RF MEMS research efforts in planar structures and phased arrays. For planar transceivers, we have demonstrated several RF MEMS devices in order to establish building blocks in integrated millimeterwave systems. For phased-array applications, we have demonstrated two architectures for beam forming and steering without solid-state phase shifters.

RF MEMS switches can be used to achieve reconfigurability of various RF systems and in particularly for miniaturized antenna structures. In case of micro machined antennas, which involve low voltage signals, RF MEMS switches with low actuation voltage are required for achieving reconfigurability. The capacitive shunt switch derives its switching property from the significant difference of its c...