It has been reported previously that three separate processes cause damage when an electric field interacts with a reticle; electrostatic discharge (ESD) and two different types of electric field-induced metal migration (EFM). This paper presents some further data analysis allowing a first-order calibration of the thresholds for these different forms of field induced reticle damage. EFM is show...

The implementation of Automated Material Handling Systems (AMHS) in 300mm semiconductor facilities provides the opportunity to realize significant benefits in fabricator productivity and performance. The leverage associated with automated reticle delivery to photolithography process tools may be less apparent than a fab-wide AMHS. However, a high product mix environment requires the tracking, s...

The literature describes tracking devices that allow a single detector coupled to a spinning FM reticle to determine target location. The spinning FM reticles presented were limited to single parameter reticles of frequency vs angle, frequency vs radius, or phase. This study presents these parameters with their capabilities and limitations and shows that multiple parameters can be integrated in...

There is a large body of research devoted to hunting lions in the Sahara Desert [2]. In none of these, however, is any concern given to feeding the lion once it is captured. In this note, we propose feeding Stan Wagon to the lion. Place an orange in the middle of the Sahara Desert. Cut it up into a finite number of pieces and rearrange the pieces to form the Sun. The gravity of the Sun will the...

This do-it-yourself approach to reticles doesn't produce the best images; contrast is low. If you do a lot of work with a particular reticle, you want the real thing. If you have occasional use for a reticle pattern, or wish to experiment with different designs, or need a unique pattern, then the method described here for projecting reticles is reasonable and cost effective. You can easily cons...