نتایج جستجو برای: rapid thermal processing

تعداد نتایج: 990139  

2007
Oleg Lupan Lee Chow Guangyu Chai Beatriz Roldan Ahmed Naitabdi Alfons Schulte Helge Heinrich

Nanofabrication and characterization of ZnO nanorod arrays and branched microrods by aqueous solution route and rapid thermal processing Oleg Lupan a,b,∗, Lee Chow a, Guangyu Chai c, Beatriz Roldan a, Ahmed Naitabdi a, Alfons Schulte a, Helge Heinrich a,d a Department of Physics, University of Central Florida, P.O. Box 162385 Orlando, FL 32816-2385, USA b Department of Microelectronics and Semi...

2015
Franck Rose Na Wang Robert Smith Qi-Fan Xiao Hiroshi Inaba Toru Matsumura Yoko Saito Hiroyuki Matsumoto Qing Dai Bruno Marchon Filippo Mangolini Robert W. Carpick

2013
M. Gottwald K. Lee J. J. Kan B. Ocker J. Wrona S. Tibus J. Langer S. H. Kang E. E. Fullerton

Understanding the thermal budget of perpendicular materials is crucial for the potential application perpendicular magnetic tunnel junctions. In this paper, we study the effects of high-temperature rapid thermal annealing on the structural and magnetic properties of ultra-thin Co/Pd multilayers deposited at room temperature. It is shown that perpendicular magnetic anisotropy of ultra-thin Co/Pd...

2013
M. A. Razali A. J. Smith R. M. Gwilliam

We present experimental results on shallow junction formation in germanium by phosphorus ion implantation and standard rapid thermal processing. An attempt is made to improve phosphorus activation by implanting phosphorus at high and low temperature. The focus is on studying the germanium damage and phosphorus activation as a function of implant temperature. Rutherford backscattering spectromet...

Journal: :Automatica 1999
Jian-Xin Xu Yangquan Chen Tong Heng Lee Shigehiko Yamamoto

A special type of iterative learning control (ILC) problem is considered. Due to the insu$cient measurement capability in many real control problems such as Rapid Thermal Processing (RTP), it may happen that only the terminal output tracking error instead of the whole output trajectory tracking error is available. In the RTP chemical vapor deposition (CVD) of wafer fab. industry, the ultimate c...

2004
Severin Borenstein

Retail real-time pricing (RTP) of electricity – retail pricing that changes hourly to reflect the changing supply/demand balance – is very appealing to economists because it “sends the right price signals.” Economic efficiency gains from RTP, however, are often confused with the short-term wealth transfers from producers to consumers that RTP can create. Abstracting from transfers, I focus on t...

1997
Yingjian Chen David E. Laughlin Xiaoding Ma Mark H. Kryder

The effects of Ba content on the dynamics of the crystallization process, which ultimately determines the grain size, were studied in barium ferrite thin films. Rapid thermal annealing was used to crystallize the amorphous as-deposited barium ferrite films. The annealing time and temperature dependent crystalline volumes were determined from the magnetization of the films, and were analyzed by ...

2001
Jie Zou Bo Bian David E. Laughlin David N. Lambeth

Post-deposition rapid thermal annealing (RTA) was performed on the Cr-less Co20at%Pt alloy with a Mn diffusion layer on top. A value of about 8 10 erg/cm3 was obtained for the as-deposited film and it decreased only up to about 10% after annealing. The high intergranular exchange coupling of the as-deposited CoPt film was suppressed by RTA and the coercivity increased dramatically from about 22...

2003
Feng Zhao Shu Yuan Michael C.Y. Chan

The effects of Zn doping in the substrate on the thermal stability of GaAsyAl Ga As single quantum well are investigated 0.24 0.76 by 900 8C rapid thermal annealing and low-temperature (12 K) photoluminescence measurements. An improvement in thermal stability is demonstrated for structures grown on Zn-doped GaAs in comparison with those grown on semi-insulating and Sidoped GaAs substrates. It i...

Journal: :Computers & Chemical Engineering 2006
Eyal Dassau Benyamin Grosman Daniel R. Lewin

In the past few years, Rapid Thermal Processes (RTP) have gained acceptance as mainstream technology for semi-conductors manufacturing. These processes are characterized by a single wafer processing with a very fast ramp heating of the silicon wafer (up to 200C/sec). The single wafer approach allows for faster wafer processing and better control of process parameters on the wafer. As feature si...

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