An analytic model of the material removal rate is proposed for chemical mechanical planarization ~CMP!. The effects of the applied pressure and the polishing velocity between the wafer surface and the pad surface are derived considering the chemical reaction as well as the mechanical bear-and-shear process. The mechanism of microscopic material removal is presented. The material removal rate is...

1 Royal National Orthopaedic Hospital, London, UK. 2Royal Preston Hospital, London, UK. Address of Correspondence

Preston, Glei, and Wilmoth (2010) recently proposed an innovative regression-based method for estimating smoking-attributable mortality in developed countries based on observed lung cancer death rates. Their estimates for females, however, differ appreciably from some published estimates. This article presents a modified version of the Preston, Glei, and Wilmoth method that includes an age-peri...