The manufacturing of systems at the mesoscale on order millimeters to centimeters is costly and challenging. To simplify development process, finite element method (FEM) can be used compare evaluate different design variations an early stage. This also allows for gaining a more precise understanding system's behavior. In robotic applications it torque that greatest interest as sufficiently high...

This paper describes an algorithm to control a two stage hydraulic servovalve designed for aerospace applications. The valve has a piezoelectric ring bender actuating a first stage spool with a significant amount of overlap to reduce internal leakage. The piezoelectric ring bender is a less complex and lighter alternative to a conventional torque motor. The second stage has electrical instead o...

Micro machined motors are a recent development in the domain of electrical machines. As compared to conventional electromagnetic motors, micro machined motors offer higher torque at lower speeds, and are they are compact in size. This paper focusses on the study of a piezoelectric ultrasonic micro motor that is based on inverse piezoelectric effect. Here, the stator with segmented piezoelectric...