As RF technologies mature designing complex RF systems is becoming an increasingly difficult task. Modern systems include components that cannot be modeled with traditional simulators. This paper introduces a modeling technique for use in RF systems that combines Maxwell’s, mechanical, and solid-state equations. The resulting simulator can be used to simulate microelectromechanical structures (...

Theoretical limits for the capacitance density of lateral flux and quasi-fractal capacitors are calculated. These limits are used to investigate the efficiency of various capacitive structures such as lateral flux and quasi-fractal structures. This study leads to two new capacitor structures with high lateralfield efficiency. Simulation and experimental results demonstrate higher capacity and s...

Theoretical limits for the capacitance density of lateral flux and quasi-fractal capacitors are calculated. These limits are used to investigate the efficiency of various capacitive structures such as lateral flux and quasi-fractal structures. This study leads to two new capacitor structures with high lateralfield efficiency. Simulation and experimental results demonstrate higher capacity and s...

This paper proposes a low power EHC that performs synchronous energy conversion on a tri-plate variable capacitor to improve the maximum achievable power. A tri-plate macro electrostatic generator with capacitor variation of 405 pF to 1.15 nF and 405 pF to 1.07 nF on two complementary adjacent capacitors operating 180° out of phase at 98 Hz is fabricated and used in the characterization of the ...

In this paper we describe an apparent paradox concerning a moving plate capacitor driven by thermal noise from a resistor. The plates are attracted together, but a demon restores the plates of the capacitor to their original position when the voltage across the capacitor is small-hence only small forces are present for the demon to work against. The demon has to work harder than this to avoid t...

In this paper, novel MEMS capacitors with flexible moving electrodes and high linearity and tunability are presented. The moving plate is divided into small and rigid segments connected to one another by connecting beams at their end nodes. Under each node there is a rigid step which selectively limits the vertical displacement of the node. A lumped model is developed to analytically solve the ...

This paper describes the design of two different surface micromachined (MEMS) accelerometers and the use of design and analysis tools intended for macro sized devices. This work leverages a process for integrating both the micromechanical structures and microelectronics circuitry of a MEMS accelerometer on the same chip. In this process, the mechanical components of the sensor are first fabrica...