To date, nano-and micro-structuring has commonly been implemented by a combination of specifically optimized processes of electron-beam lithography and reactive ion etching, thus limiting the range of materials that can be structured to only a few. In this talk we will introduce focused ion beam (FIB) milling as an emerging technology that enables fast, reliable and well-controlled nanometer-si...

We report easy to implement techniques for the fabrication of high aspect ratio LiNbO3 photonic crystals. The methods rely on optical grade dicing followed by focused ion beam (FIB) milling. A 2D photonic crystal with an extinction ratio of -14dB is demonstrated. We show how the techniques can be combined for the development of 3D photonic crystals. LiNbO3, ridge waveguides; photonic crystals,

Nanochannels fabricated in fused silica substrates are ideal tools for single (bio)molecular studies in biology and are promising in the development of innovative applications in chemistry. To obtain a higher throughput and a higher level of integration and functionalization, nanochannels with high aspect ratios and nano-in-nano structures are very much desired, but their fabrication is a chall...

We propose and demonstrate a scheme that enables spectral tuning of a photonic crystal high-quality resonant mode, in steps finer than 0.2 nm, via electron beam induced deposition of carbonaceous nano-dots. The position and size of a nano-dot with a diameter of <100 nm are controlled to an accuracy on the order of nanometers. The possibility of selective modal tuning is also demonstrated by pla...

The effect of a sacrificial layer residue on a cantilever beam in the nano-electro-mechanical nonvolatile memory is investigated for the optimization of reliability characteristics. Different from previous research, pull in voltage model of nano-electro-mechanical nonvolatile memory used triangular residue layer which is considered by real wet etching process. Modified pull in voltage model was...

P-beam writing (proton beam writing) is a unique direct write 3D nano-lithographic technique which has been developed at the Centre for Ion Beam Applications (CIBA), in the Physics Department of the National University of Singapore. This technique employs a focused MeV proton beam which is scanned in a predetermined pattern over a resist (e.g. PMMA, SU-8 or HSQ), which is subsequently chemicall...

Among the intermolecular interactions, the Casimir and van der Waals forces are the most important forces that highly affect the behavior of nanostructures. This paper studies the effect of such forces on the adhesion of cantilever freestanding nanostructures. The nanostructures are made of a freestanding nano-beam which is suspended between two upper and lower conductive surfaces. The linear s...

Research in recent years has greatly advanced the understanding and capabilities of multi-beam interference (MBI). With this technology it is now possible to generate a wide range of one-, two-, and three-dimensional periodic optical-intensity distributions at the microand nano-scale over a large length/area/volume. These patterns may be used directly or recorded in photo-sensitive materials us...

We propose electron beam excitation assisted optical microscope, and demonstrated its resolution higher than 50 nm. In the microscope, a light source in a few nanometers size is excited by focused electron beam in a luminescent film. The microscope makes it possible to observe dynamic behavior of living biological specimens in various surroundings, such as air or liquids. Scan speed of the nano...