The role of very low temperature (90-170oC) high density inductively coupled plasma chemical vapor deposition (HDICP CVD) process in RF MEMS switch fabrication is addressed. The results on SiNx layers produced by both HDICP CVD and plasma enhanced CVD (PECVD) are compared in terms of surface roughness, breakdown voltage and RF MEMS switch performance. It is found that HDICP CVD can provide very...

This work shows zero-power shock sensing for the combination of a micro-triboelectric generator and MEMS electrostatic actuator system where mechanical to causes it produce voltage, this voltage is used actuate Micro-Electro-Mechanical-system (MEMS) switch. For first time, we present fabrication process Triboelectric-Nano-Generator (TENG) with technology. The MEMS-TENG has suspended 1.5 mm × pl...

Radio Frequency Micro-Electro-Mechanical-Systems (RF MEMS) based switches are expected to play a key role in the field of microwave switching. Traits like low-loss performance; zero-power consumption and very low inter-modulation distortion have made these switches well suitable for high-performance microwave and millimeter-wave circuits. The design of RF MEMS switches, however, require sophist...

Mobile technologies have relied on RF switches for a long time. Though the basic function of the switch has remained the same, the way they have been made has changed in the recent past. In the past few years work has been done to use MEMS technologies in designing and fabricating an RF switch that would in many ways replace the electronic and mechanical switches that have been used for so long...

Abstract In this paper we present design and analysis of RF MEMS switches with crab-leg connection beam structures. The mechanical characteristics of switch including pull down voltage, hysteresis analysis and capacitance between beam and center conductor are studied. RF characterization of the switch including insertion loss, return loss and isolation are also investigated. Measurement results...

This paper discusses issues relating to the reliability and methods for employing high-cycle life testing in capacitive RF MEMS switches. In order to investigate dielectric charging, transient current spectroscopy is used to characterize and model the ingress and egress of charges within the switch insulating layer providing an efficient, powerful tool to investigate various insulating material...

A low actuation voltage RF MEMS shunt capacitive switch has been designed and simulated for use in X-band (8-12GHz) applications. The MEMS switch is a freely moving membrane over coplanar waveguide. Double meander structure of tuned dual beam is used here to improve the isolation of switch. Actuation is achieved by using electrostatic mechanism because of its low power consumption, small size a...

This paper presents the design, fabrication and characterization of an RF MEMS switch. Low actuation voltage and high isolation of the switch were achieved by exploiting buckling and bending effects induced by well-controlled residual stress. The effects of residual stress on improving the switch performance have been investigated using both analytical and numerical methods. The proposed RF swi...