MEMS microphone has a wide range of application prospects in electronic devices such as mobile phones, headphones, and hearing aids due to its small size, low cost, reliable performance. Research development microphones involves multiple thermo-electro-mechanical couplings among various physical electrical fields. Unfortunately, there is not an accurate three-dimensional (3D) simulation platfor...

With the current technological transformation in automotive industry, autonomous vehicles are getting closer to Society of Automative Engineers (SAE) automation level 5. This corresponds full vehicle automation, where driving system autonomously monitors and navigates environment. SAE-level 5, concept a Shared Autonomous Vehicle (SAV) will soon become reality mainstream. The main purpose an SAV...

The paper presents the performance optimization of a MEMS accelerometer based microphone for the fully implantable hearing application. A genetic algorithm is employed to optimize the device geometry parameters satisfying the design constraints. The analytical model run on MATLAB and the simulation model implemented in COMSOL MULTIPHYSICS 4.2 show good agreement. Optimization with Genetic algor...

This chapter describes the design and implementation of a Smart Acoustic Sensor Array (SASA) System consists of a 52 microphone MEMS array embedded in an FPGA (Field Programmable Gate Array) platform with real-time data acquisition, signal processing, and network communication capabilities. The SASA system is evaluated using several case studies in order to demonstrate the versatility and scala...

Audio applications such as mobile communication and hearing aid devices demand a small size but high performance, stable and low cost microphone to reproduce a high quality sound. Capacitive microphone can be designed to fulfill such requirements with some trade-offs between sensitivity, operating frequency range, and noise level mainly due to the effect of device structure dimensions and visco...

examination and a comparison of conventional ECM with the experimental model, a silicon diaphragm condenser microphone produced using the MEMS method. The silicon diaphragm satisfies high-temperature resistance and stable temperature characteristics because of its very small coefficient of linear expansion and it is measured total harmonic distortion THD on high pressure sound. Finally, it will...