This paper presents a new, high-performance silicon-on-insulator (SOI) MEMS gyroscope with decoupled oscillation modes. The gyroscope tructure allows it to achieve matched-resonance-frequencies, large drive-mode oscillation amplitude, high sense-mode quality factor, and low echanical cross-talk. The gyroscope is fabricated through the commercially available SOIMUMPS process of MEMSCAP Inc. The ...

As an important sensing element, the whispering gallery mode resonator (WGMR) parameters seriously affect the resonant micro-optic gyroscope (RMOG) performance. This work proposes an under-coupling resonator to improve the resonator's Q value and to optimize the coupling coefficient to maximize the RMOG's sensitivity. GeO₂-doped silica waveguide-type resonators with different coupling coefficie...

A new robust multi-degree of freedom (multi-DOF) MEMS gyroscope is presented in this paper. The designed gyroscope has its bandwidth and amplification factor of the sense mode adjusted more easily than the previous reported multi-DOF MEMS gyroscopes. Besides, a novel spring system with very small coupling stiffness is proposed, which helps achieve a narrow bandwidth and a high amplification fac...

Silicon-MEMS gyroscope is an important part of MEMS ( Micro Electrical Mechanical System). There are some disturb ignored in traditional gyroscope that must be evaluated newly because of its smaller size (reach the level of micron). In these disturb, the air pressure largely influences the performance of the MEMS gyroscope. Different air pressure causes different gas damping coefficient for the...

In a ring laser gyroscope, due to the rotation and the Sagnac effect, a phase difference between the two counter-propagating beams is generated. In this device, the higher phase difference between these two beams causes the better the interference pattern detection, and thus the sensitivity is increased. In this paper, the effect of inserting a dielectric-graphene photonic crystal inside a ring...

Recently, consumer applications have dramatically created the demand for low-cost and compact gyroscopes. Therefore, on the basis of microelectromechanical systems (MEMS) technology, many gyroscopes have been developed and successfully commercialized. A MEMS gyroscope consists of a MEMS device and an electrical circuit for self-oscillation and angular-rate detection. Since the MEMS device and c...

A bulk micromachined inertial measurement unit (MIMU) is presented in this paper. Three single-axis accelerometers and three single-axis gyroscopes were simultaneously fabricated on a silicon wafer using a bulk micromachining process; the wafer is smaller than one square centimeter. In particular, a global area optimization method based on the relationship between the sensitivity and layout are...

In crane automation systems, precise knowledge of the load position is a key factor for fulfilling positioning accuracy requirements. This contribution presents a nonlinear observer design for harbor cranes which makes use of gyroscope measurements. Both single-pendulum load configurations and more complex double-pendulum configurations are considered. The gyroscope sensors are attached to the ...