In this paper the effect of corrugated diaphragm on performance of MEMS microphone is described. The corrugated diaphragm is modeled in order to improve the sensitivity of micromachined silicon acoustic sensor. Analytical analyzes have been carried out to derive mathematic expressions for the mechanical sensitivity and displacement of corrugated diaphragm with residual stress. It is shown that ...

The deformable lung phantom was developed to account for the patient breathing motion, and to evaluate for a deformable image registration algorithm. The phantom consisted of an acryl cylinder filled with water and a latex balloon located in the inner space of the cylinder. A silicon membrane was attached to the inferior end of the phantom. This silicon membrane was designed to simulate a real ...

eventration of the diaphragm is a condition characterized by an attenuated but otherwise intact diaphragm. twenty patients (age range: 2 days to 11 years) were treated for eventration of the diaphragm during a ten year period (19 85-1995). there were 11 girls and 9 boys with a mean gestational age of 37 weeks. 14 patients were born with cephalic presentation, 3 patients with breech delivery and...

Normal subjects can increase their capacity to sustain hyperpnoea by bracing their arms on fixed objects, a procedure which is also known to reduce dyspnoea in patients with chronic obstructive pulmonary disease (COPD). In the present study, it was tested whether bracing per se could improve the function of the diaphragm. The effect of bracing on diaphragm function was studied in six normal sub...

The most common cause of cancer death in both men and women is lung cancer. External Beam Radiation Therapy (EBRT) is one of the primary treatment methods used for lung cancer. However, dosimetric accuracy is often compromised due to respiration-induced tumor motion. Real-time tumor tracking is a common approach for lung tumor motion compensation as it allows for fast and accurate radiation del...

This paper reports a nano-opto-mechanical pressure sensor based on nano-scaled ring resonator. The pressure is measured through the output spectrum shift which is induced via mechanical deformation of the ring resonator. The sensitivity as high as 1.47 pm/kPa has been experimentally achieved which agrees with numerical prediction. Due to the strong variation of sensitivity with different ring r...

So far, there have been a large number of diaphragm walls in the Yangtze River Delta as engineering examples deep foundation pit maintenance structures subway stations, but is lack systematic research and summary on deformation characteristics ground connecting walls. This study aimed to clarify law wall during excavation soft soil region. Based monitoring data Hangzhou metro station, pits 15 s...

It is expected that chemical, biological and environmental applications of microdevices will increase with new developments in micromachining techniques. In this work, a micropump design that utilizes passive valves and an actuated diaphragm is presented. The flow rate is controlled by the deflection and the frequency of the diaphragm’s displacement. Passive valves are used for directing the fl...