While ceramics are important materials for electronic and microsystem packaging, they are difficult to pattern lithographically. LEEDUS, a fabrication process combining lithography, electroplating, batch mode micro electro-discharge machining (µEDM) and batch mode micro ultrasonic machining (µUSM), is presented in this paper. This technology provides die-scale pattern transfer capability from l...

A novel flexible mixed-potential-type (MPT) sensor was designed and fabricated for NO₂ detection from 0 to 500 ppm at 200 °C. An ultra-thin Y₂O₃-doped ZrO₂ (YSZ) ceramic film 20 µm thick was sandwiched between a heating electrode and reference/sensing electrodes. The heating electrode was fabricated by a conventional lift-off process, while the porous reference and the sensing electrodes were f...

Lithium-based rechargeable batteries offer superior specific energy and power, and have enabled exponential growth in industries focused on small electronic devices. However, further increases in energy density, for example for electric transportation, face the challenge of harnessing the lithium metal as negative electrode instead of limited-capacity graphite and its heavy copper current colle...

In this study, microelectro-discharge (micro-ED) milling of nonconductive ZrO2ceramicsis investigated using a Cu tool electrode in kerosene dielectric. An adhesive Cu foil is firmly attached on the workpiece to initiate the sparks. After the machining of Cu foil, an electrically conductive carbonic layer is formed on the ceramic workpiece disassociating the kerosene dielectric, which allows mic...

Electrode material for low-temperature co-fired diopside glass-ceramic used for microwave dielectrics was investigated in the present work. Diffusion of silver from the electrode to diopside glass-ceramics degrades the performance of the microwave dielectrics. Two approaches were adopted to resolve the problem of silver diffusion. Firstly, silicon-oxide (SiO₂) powder was employed and secondly c...