This paper studies the effects of a constricted squeeze film on the performance of an optical microelectromechanical system accelerometer. Squeeze films are shown to extend the sensor frequency range (bandwidth) in accelerometers without decreasing the mechanical sensitivity by retarding the resonate response. By restricting the venting of a squeeze film, this preferential behavior is observed ...

Archibald [1] analyzed the performance of a squeeze film between various geometrical configurations. Later on Wu [2, 3] investigated a squeeze film behavior for mainly, two types of geometries namely, annular and rectangular. Prakash and Viz [4] developed some aspects of the analysis incorporated in Wu [2, 3] and obtained the load carrying capacity ultimately leading to time height relation for...

Squeeze-film damping plays a significant role in the performance of micro-resonators because it determines their quality factors. Perforations in microstructures are often used to control the squeeze-film damping in micro-resonators. To model the perforation effects on the squeeze-film damping, many analytical models have been proposed, however, most of the previous models have been concerned w...