The work investigates the impact of plasma nitridation process parameters upon the physical properties and upon the electrical performance of sub-15 Å plasma nitrided gate dielectrics. The nitrogen distribution and chemical bonding of ultra-thin plasma nitrided films have been investigated using XPS. It is shown that N-Si3 bonds are dominant in the ultra-thin plasma nitrided films, and that O2=...

The crystal structure of a natural tobermorite from Zeilberg, Maroldsweisach, Germany (average formula Ca2.2s[Si307.s(OH)1.5]'1 H20), is solved using the data obtained from an automatic diffractometer. For the structure determination only the sharp main reflexions are considered. The crystal data of the chosen subcell are: a' = 5.586(4) A, b' = 1696(2) A, C = 22.779(7) A, S.G. Imm2, V = 470.25 ...

This paper reports a new method for making high aspect ratio Single Crystalline Silicon (SCS) microstructures om multi layer substrates using Chemical Mechanical Polishing (CMP), Silicon Fusion Bonding (SFB) and Reactive Ion Etching (NE) techniques. First Si-Si02-PolySi-Si02-Si sandwich wafers were fabricated using CMP and SFB. Then microstructures were fabricated on these sandwich wafers using...

The High accuracy extrapolated ab initio thermochemistry (HEAT) protocol has been applied to a variety of commonly studied chemical species in order to obtain the thermodynamic energy values of their relevant states – primarily ground states but not necessarily. The work aims to extend the growing list of molecules already treated by the protocol, computed purely from theoretical standpoint wit...

The infrared diode laser spectrum of the Sic1 + ion generated in a discharge of Sic& mixed with He has been observed by the hollow cathode discharge modulation method. Sixteen and nine absorption lines for the Si3sCl+ and Si37C1+ isotopic species, respectively, have been assigned to R and P branch transitions of tbe fundamental band. The spectroscopic constants derived from simultaneous analysi...

A series of anthraquinone-imide-based dimers, C5 -AQI-Si2, C5 -AQI-Si3, C5 -AQI-Si4, and C5 AQI-Si8, have been prepared by the hydrosilylation of N-(hex-5-enyl)-6-(40-((S)-2-methylbutoxy)phenyl)anthraquinone-2,3-dicarboxylic imide and hydride-terminated siloxanes with different lengths. Their liquid crystalline behaviors, and piezochromic and near-infrared electrochromic properties have been ch...

Hydrogenated amorphous silicon oxide photoluminescent nanopowders have been synthesized using a simple solution method involving the reaction of lithium with trichlorosilane in tetrahydrofuran at room temperature. The powders exhibited maximum luminescent peak at 1.1 eV and had an average composition of SiO0.92H0.53. They possess inhomogeneous microstructures that contain a-Si clusters (Si3–Si–...

Two-photon laser-induced fluorescence measurements were performed on the helicity injected torus (HIT-SI3) device to determine the density and temperature of the background neutral deuterium population. Measurements were taken in 2 ms long pulsed plasmas after the inductive helicity injectors were turned off. Attempts to measure neutrals during the main phase of the plasma were unsuccessful, li...