In this paper a novel RF MEMS cantilever type switch with low actuation voltage is presented. The cantilever beam of switch is supported by two L-shaped springs to reduce the spring constant. The switch is simulated using Intellisuite software. The actuation voltage of switch is achieved about 2 volt and the size of the switch is 110×60μm, that in compared with other electrostatic cantilever be...

The most promising method for micro scale energy scavenging is via vibration energy harvesting which converts mechanical energy to electrical energy. Using piezoelectric cantilevers is the most common method for vibration energy harvesting. Changing the shape of the cantilevers can lead to changing the generated output voltage and power. In this work vibration energy harvesting via piezoelectri...

Knowledge of the interaction forces between surfaces gained using an atomic force microscope (AFM) is crucial in a variety of industrial and scientific applications and necessitates a precise knowledge of the cantilever spring constant. Many methods have been devised to experimentally determine the spring constants of AFM cantilevers. The thermal fluctuation method is elegant but requires a the...

Plasmonic lithography with a contact probe records nano-meter scale features and has high-throughput owing to its capability to scan in contact mode. The probe is commonly based on a micrometer-scale cantilever, which leads to the tip-positioning problem due to force-deflection that induces lateral tip displacement. We propose a geometrically modified probe to achieve high positioning accuracy....

We present a micro-mechanical terahertz (THz) detector fabricated on silicon insulator (SOI) substrate and operating at room-temperature. The device is based U-shaped cantilever of micrometric size, top which two aluminum half-wave dipole antennas are deposited. This produces an absorption extending over the $\sim 2-3.5$THz frequency range. Due to different thermal expansion coefficients alumin...